Turbo Molecular Pump
The turbo molecular pump is designed for high vacuum applications, offering efficient and reliable performance for various industries.
Specification Snapshot
Maximum Power Consumption
1.5kW
Flange Size
DN160
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Overview
The turbo molecular pump is designed for high vacuum applications, offering efficient and reliable performance for various industries.
Specifications
| Parameter | Value |
|---|---|
| Rotation Speed | 90,000rpm |
| Pumping Speed | 500L/s |
| Start-up Time | ≤3min |
| Maximum Power Consumption | 1.5kW |
| Weight | 25kg |
| Flange Size | DN160 |
| Operating Temperature Range | 10-40°C |
| Noise Level | ≤50dB |
| Vibration Level | ≤0.01μm |
Applications
1. Semiconductor manufacturing 2. Surface analysis 3. Vacuum coating 4. Research and development
Key Features
1. High-speed rotation for efficient vacuum generation 2. Compact and lightweight design 3. Low noise and vibration levels 4. Energy-efficient operation
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Osaka Vacuum, Ltd. is a Japanese vacuum pump manufacturer founded in 1950. For over 75 years, the company has specialized in design, manufacturing, sales, and maintenance of vacuum pumps and systems. Its extensive product lineup includes magnetically levitated and ball-bearing turbo molecular pumps, dry vacuum pumps, roots pumps, oil-sealed rotary pumps, and vacuum systems, serving semiconductor, electronics, medical, aerospace, optical, and chemical industries worldwide.</p>
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