Optical Metrology

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  • China
  • UlvacShanghai
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  • 膜厚测量仪 Optical Metrology

    膜厚测量仪

    China
    Category: Optical Metrology
    Manufacturer: UlvacShanghai
    Model: 1500A, 2000A, 3000A Wavelength Range: 530~750nm, 380~760nm (optional) Spot Diameter: φ1mm, φ0.3mm (optional) Incident Angle: 70° fixed Film Thickness Reproducibility: 1σ=0.1nm
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