Laser Micro/Nanoprocessing System - ImpeRay Series
The ImpeRay laser micro/nanomachining series is an ultraprecision system with optional ultrafast lasers of various brands/models, electrically controlled micro/nanometer-precision stages and varied focusing heads. A granite base and gantry provide compact industrial stability/reliability. Enclosed beam delivery, adjustment and imaging include beam shaping, power monitoring, coaxial illumination and vision modules. An integrated electrical cabinet has emergency stop. These small-to-medium systems provide research and industrial solutions such as precise micro/nano laser cutting, welding, marking, drilling, microstructure fabrication and pigment treatment in medical aesthetics.
Specification Snapshot
Pulse Width [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications]
≤35 fs
Output Power [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications]
≥7 W
Repetition Rate [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications]
Up to 10KHz
Center Wavelength [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications]
790±10
Energy Stability [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications]
<0.75%RMS
Polarization State [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications]
Linear Polarization, Horizontal Direction
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Overview
The ImpeRay laser micro/nanomachining series is an ultraprecision system with optional ultrafast lasers of various brands/models, electrically controlled micro/nanometer-precision stages and varied focusing heads. A granite base and gantry provide compact industrial stability/reliability. Enclosed beam delivery, adjustment and imaging include beam shaping, power monitoring, coaxial illumination and vision modules. An integrated electrical cabinet has emergency stop. These small-to-medium systems provide research and industrial solutions such as precise micro/nano laser cutting, welding, marking, drilling, microstructure fabrication and pigment treatment in medical aesthetics.
Specifications
| Parameter | Value |
|---|---|
| Pulse Width [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications] | ≤35 fs |
| Output Power [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications] | ≥7 W |
| Repetition Rate [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications] | Up to 10KHz |
| Center Wavelength [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications] | 790±10 |
| Spot Mode [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications] | M²≤1.3(TEM₀₀) |
| Energy Stability [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications] | <0.75%RMS |
| Contrast [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications] | >1000:1 pre pulse;>150:1 post pulse |
| Beam Stability [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications] | <20 μrad/°C |
| Spot Size [Page3 ImpeRay Compatible Ti:sapphire/Astrella;Custom Parameters,Not Unconditional System Specs;1/e²] | ~6 |
| Polarization State [Page 3 ImpeRay Compatible Laser: Ti:sapphire/Astrella; All Parameters Customizable; Not Unconditional Whole-System Specifications] | Linear Polarization, Horizontal Direction |
| Pulse Width [Page 3 ImpeRay Compatible Laser: Yb:KGW/Pharos; All Parameters Customizable; Not Unconditional Whole-System Specifications] | ≤290 fs |
| Output Power [Page 3 ImpeRay Compatible Laser: Yb:KGW/Pharos; All Parameters Customizable; Not Unconditional Whole-System Specifications] | 10、20 |
| Repetition Rate [Page 3 ImpeRay Compatible Laser: Yb:KGW/Pharos; All Parameters Customizable; Not Unconditional Whole-System Specifications] | Up to 1MHz |
| Center Wavelength [Page 3 ImpeRay Compatible Laser: Yb:KGW/Pharos; All Parameters Customizable; Not Unconditional Whole-System Specifications] | 515nm, and 1030nm |
| Spot Mode [Page 3 ImpeRay Compatible Laser: Yb:KGW/Pharos; All Parameters Customizable; Not Unconditional Whole-System Specifications] | M²≤1.5(TEM₀₀) |
| Energy Stability [Page 3 ImpeRay Compatible Laser: Yb:KGW/Pharos; All Parameters Customizable; Not Unconditional Whole-System Specifications] | <0.5%RMS |
| Contrast [Page 3 ImpeRay Compatible Laser: Yb:KGW/Pharos; All Parameters Customizable; Not Unconditional Whole-System Specifications] | >1000:1 pre pulse;>150:1 post pulse |
| Beam Stability [Page 3 ImpeRay Compatible Laser: Yb:KGW/Pharos; All Parameters Customizable; Not Unconditional Whole-System Specifications] | <20 μrad/°C |
| Spot Size [Page3 ImpeRay Compatible Laser Yb:KGW/Pharos;Custom Parameters,Not Unconditional System Specs;1/e²] | ~3 |
| Polarization State [Page 3 ImpeRay Compatible Laser: Yb:KGW/Pharos; All Parameters Customizable; Not Unconditional Whole-System Specifications] | Linear Polarization, Horizontal Direction |
| Pulse Width [Page 3 ImpeRay Compatible Laser: Yb:KGW/Tangor; All Parameters Customizable; Not Unconditional Whole-System Specifications] | ≤350 fs |
| Output Power [Page 3 ImpeRay Compatible Laser: Yb:KGW/Tangor; All Parameters Customizable; Not Unconditional Whole-System Specifications] | 50、100 |
| Repetition Rate [Page 3 ImpeRay Compatible Laser: Yb:KGW/Tangor; All Parameters Customizable; Not Unconditional Whole-System Specifications] | Up to 1MHz |
| Center Wavelength [Page 3 ImpeRay Compatible Laser: Yb:KGW/Tangor; All Parameters Customizable; Not Unconditional Whole-System Specifications] | 515nm, and 1030nm |
| Spot Mode [Page 3 ImpeRay Compatible Laser: Yb:KGW/Tangor; All Parameters Customizable; Not Unconditional Whole-System Specifications] | M²≤1.5(TEM₀₀) |
| Energy Stability [Page 3 ImpeRay Compatible Laser: Yb:KGW/Tangor; All Parameters Customizable; Not Unconditional Whole-System Specifications] | <0.5%RMS |
| Contrast [Page 3 ImpeRay Compatible Laser: Yb:KGW/Tangor; All Parameters Customizable; Not Unconditional Whole-System Specifications] | >1000:1 pre pulse;>150:1 post pulse |
| Beam Stability [Page 3 ImpeRay Compatible Laser: Yb:KGW/Tangor; All Parameters Customizable; Not Unconditional Whole-System Specifications] | <50 μrad/°C |
| Spot Size [Page3 ImpeRay Compatible Laser Yb:KGW/Tangor;Custom Parameters,Not Unconditional System Specs;1/e²] | ~3 |
| Polarization State [Page 3 ImpeRay Compatible Laser: Yb:KGW/Tangor; All Parameters Customizable; Not Unconditional Whole-System Specifications] | Linear Polarization, Horizontal Direction |
| Input Aperture [Page 3 ImpeRay Compatible Additional Module: Scanning Galvanometer; All Parameters Customizable] | ≤14 mm |
| Standard Scan Angle [Page 3 ImpeRay Compatible Additional Module: Scanning Galvanometer; All Parameters Customizable] | 40 ° |
| Focal Length [Page 3 ImpeRay Compatible Additional Module: Field Lens; All Parameters Customizable] | f60/f100/f150 |
| Magnification [Page 3 ImpeRay Compatible Additional Module: Objective; All Parameters Customizable] | 5X/10X/20X/50X |
| Attenuation Range [Page 3 ImpeRay Compatible Additional Module: Power Attenuator; All Parameters Customizable] | 0.1%~97% |
| Switching Delay [Page 3 ImpeRay Compatible Additional Module: Shutter; All Parameters Customizable] | 170 ms |
| Bragg-Grating Inscription Contrast [Independent Typical Application Text on Page 4; Fiber Bragg Grating Writing] | 50 dB |
| Travel [Page 3 ImpeRay Compatible Motion Platform X Axis; All Parameters Customizable] | ≤600 mm |
| Resolution [Page 3 ImpeRay Compatible Motion Platform X Axis; All Parameters Customizable] | 5 nm |
| Positioning Accuracy [Page 3 ImpeRay Compatible Motion Platform X Axis; All Parameters Customizable] | ≤±1 |
| Positioning Repeatability [Page 3 ImpeRay Compatible Motion Platform X Axis; All Parameters Customizable; Bidirectional] | ≤±0.5 |
| Maximum Speed [Page 3 ImpeRay Compatible Motion Platform X Axis; All Parameters Customizable] | 2000 mm/s |
| Maximum Load [Page 3 ImpeRay Compatible Motion Platform X Axis; All Parameters Customizable] | 150 kg |
| Travel [Page 3 ImpeRay Compatible Motion Platform Y Axis; All Parameters Customizable] | ≤600 mm |
| Resolution [Page 3 ImpeRay Compatible Motion Platform Y Axis; All Parameters Customizable] | 5 nm |
| Positioning Accuracy [Page 3 ImpeRay Compatible Motion Platform Y Axis; All Parameters Customizable] | ≤±1 |
| Positioning Repeatability [Page 3 ImpeRay Compatible Motion Platform Y Axis; All Parameters Customizable; Bidirectional] | ≤±0.5 |
| Maximum Speed [Page 3 ImpeRay Compatible Motion Platform Y Axis; All Parameters Customizable] | 2000 mm/s |
| Maximum Load [Page 3 ImpeRay Compatible Motion Platform Y Axis; All Parameters Customizable] | 70 kg |
| Travel [Page 3 ImpeRay Compatible Motion Platform Z Axis; All Parameters Customizable] | ≤300 mm |
| Resolution [Page 3 ImpeRay Compatible Motion Platform Z Axis; All Parameters Customizable] | 0.1 μm |
| Positioning Accuracy [Page 3 ImpeRay Compatible Motion Platform Z Axis; All Parameters Customizable] | ≤±1.5 |
| Positioning Repeatability [Page 3 ImpeRay Compatible Motion Platform Z Axis; All Parameters Customizable; Bidirectional] | ≤±1 |
| Maximum Speed [Page 3 ImpeRay Compatible Motion Platform Z Axis; All Parameters Customizable] | 200 mm/s |
| Maximum Load [Page 3 ImpeRay Compatible Motion Platform Z Axis; All Parameters Customizable] | 70 kg |
| Travel [Page 3 ImpeRay Compatible Motion Platform B Axis; All Parameters Customizable] | ±90 ° |
| Resolution [Page 3 ImpeRay Compatible Motion Platform B Axis; All Parameters Customizable] | 0.06 arc sec |
| Positioning Accuracy [Page 3 ImpeRay Compatible Motion Platform B Axis; All Parameters Customizable] | 1 arc sec |
| Positioning Repeatability [Page 3 ImpeRay Compatible Motion Platform B Axis; All Parameters Customizable; Bidirectional] | 3 arc sec |
| Maximum Speed [Page 3 ImpeRay Compatible Motion Platform B Axis; All Parameters Customizable] | 600 rpm |
| Maximum Load [Page 3 ImpeRay Compatible Motion Platform B Axis; All Parameters Customizable] | 100 kg |
| Travel [Page 3 ImpeRay Compatible Motion Platform C Axis; All Parameters Customizable] | 360 ° |
| Resolution [Page 3 ImpeRay Compatible Motion Platform C Axis; All Parameters Customizable] | 0.2 arc sec |
| Positioning Accuracy [Page 3 ImpeRay Compatible Motion Platform C Axis; All Parameters Customizable] | 3 arc sec |
| Positioning Repeatability [Page 3 ImpeRay Compatible Motion Platform C Axis; All Parameters Customizable; Bidirectional] | 6 arc sec |
| Maximum Speed [Page 3 ImpeRay Compatible Motion Platform C Axis; All Parameters Customizable] | 600 rpm |
| Maximum Load [Page 3 ImpeRay Compatible Motion Platform C Axis; All Parameters Customizable] | 20 kg |
Applications
Precision Laser Etching,Cutting,Hole Making,Welding and Marking;Laser Microstructures;Precision Scribing/Cutting of Phone Cover Glass and ITO Films;2D/3D Surface Microstructures Down to Nanometer Dimensions;Waveguide Engraving,Fiber-Grating Writing;Nanodrilling
Key Features
Precision Multiaxis Stage,Ultrastable Granite Gantry;Various Ultrafast Lasers;Modular Beam Delivery;Versatile Heads;CNC3-Axis PSO,Linear/Arc/Helical Interpolation;G-Code,Direct DXF/DWG Galvo Processing;Online Laser Power Control;Coaxial Positioning/Process/Quality Vision;Custom Vacuum Pump/Dust Collector;Head Options:Galvo,Helical Scan,High-NA Objective;Custom Fixtures;Optional Range Sensor for Position/Autofocus/Assisted Alignment
Datasheet
Product Datasheet
PDF
Supplier Information
Xi'an Shangtai Optoelectronic Technology Co., Ltd., established in 2013 and located in Xi'an High-tech Zone, mainly engaged in technical services, R&D, production, sales, agency of ultrafast laser products, ultrafast laser processing and manufacturing systems, optical electronic products, high-precision machine tools, machine vision and photoelectric detection instruments, and software development. Adhering to the philosophy of 'technology as the core, market as the guide', the company's products are widely applied in fundamental scientific research, new material research, precision machining, high-performance measurement, etc. Its main products include SabRay femtosecond laser micromachining system, ImpeRay micromachining system, various processing heads, EOS7500 electro-optic switch, etc., providing optimal solutions for femtosecond ultra-fine micromachining for both scientific and industrial users.
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