Chromatic Confocal Probe TS-M5000
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Specifications
| Parameter | Value |
|---|---|
| Measurement Range [Parameter image_01 probe technical-specification table; TS-M5000] | 6 mm |
| Working Distance [Parameter image_01 probe technical-specification table; TS-M5000] | 10.5 mm |
| Repeatability [Parameter image_01 probe technical-specification table; TS-M5000] | 140 nm |
| Repeatability [Parameter image_01 probe technical-specification table; TS-M5000; 512-sample moving average] | 8 nm |
| Linearity [Parameter image_01 probe technical-specification table; TS-M5000] | ±1.0 μm |
| Maximum Tilt Angle [Parameter image_01 probe technical-specification table; TS-M5000] | 14 ° |
Key Features
Datasheet
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