Full-Spectrum Ellipsometric Thickness Measurement Instrument SE950
This instrument measures optical constants and analyzes spectra of functional materials. The stated principle is that polarization changes while light interacts with an optical component. An ellipsometer measures polarization before/after transmission through or reflection from the component. Because the change results from light–material interaction, it reveals physical surface properties. The surface may be the component itself, a single/multilayer film stack or contamination. Reflection at nonzero incidence changes phase and amplitude according to sample thickness and optical response, such as absorption or transparency. This is ellipsometry; each wavelength yields two independent parameters, Ψ and △.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Basic Functions [Parameter Image_01; This Product's SE950 Column Only] | Dedicated to Optical Use |
| Wavelength Range [Parameter Figure _01; This Product's SE950 Column Only; Cell Has No Unit, nm Not Borrowed from Other Columns] | 280-1050 |
| Repeatability Measurement Accuracy [Parameter Image_01; This Product's SE950 Column Only] | 0.05 nm |
| Focusing Method [Parameter Image_01; This Product's SE950 Column Only] | Autofocus |
| Mapping Travel [Parameter Image_01; This Product's SE950 Column Only] | None |
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