MC Motion Control Board E-MC
E-MC is a high-performance industrial main control board based on the standard 6U VME architecture. It uses high-performance multicore DSP and ZYNQ main processors and communicates with laser-interferometer axis cards through the P2bus bus. Suitable for large-scale real-time signal processing and multicore parallel processing, it has been used in nanometer-level motion control for step-and-scan lithography. Applications include projection step-and-scan lithography, electron-beam lithography, electron-beam inspection and nanoimprinting.
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