PM54.01 Piezoelectric Objective Stage
Specification Snapshot
Z-Direction Closed-Loop Travel [Tolerance ±15%]
100 μm
Z-Direction Maximum Travel [Tolerance ±15%]
120 μm
Resolution
1 nm
Linearity
0.1%/0.05%
Repeatability
10 nm
Capacitance [Tolerance ±15%]
3 μF
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Specifications
| Parameter | Value |
|---|---|
| Z-Direction Closed-Loop Travel [Tolerance ±15%] | 100 μm |
| Z-Direction Maximum Travel [Tolerance ±15%] | 120 μm |
| Closed-Loop Sensor | SGS / Capacitance |
| Resolution | 1 nm |
| Linearity | 0.1%/0.05% |
| Repeatability | 10 nm |
| Z-Direction Position Noise | 0.2 nm |
| θx Angular Crosstalk [Tolerance ±10%] | 10 μrad |
| θy Angular Crosstalk [Tolerance ±10%] | 10 μrad |
| Thrust / Pulling Force [Tolerance ±15%] | 100/20 |
| Capacitance [Tolerance ±15%] | 3 μF |
| No-Load Resonant Frequency [Tolerance ±15%] | 650 Hz |
| Resonant Frequency [Tolerance ±15%; Load 150g] | 290 Hz |
| Mass [Tolerance ±5%] | 280 g |
| Objective Diameter | 39 mm |
| Cable Length [Tolerance ±5%] | 1.5 m |
| Interface | D-sub 15/D-sub 7W2 |
| Material | Stainless Steel |
| Operating Temperature | -20~80 °C |
Key Features
Long-Travel Objective Scanning Stage (Source: 扫面台), up to 800μm; Subnanometer Resolution; Capacitive Closed Loop, Linearity Better Than 0.05%
Datasheet
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Supplier Information
Raiven Technology, founded in 2023 and located in Shanghai Zhangjiang Science City, focuses on advanced measurement and control technology. Targeting fields such as pan-semiconductor and commercial aerospace, it provides micro/nano measurement and control solutions, including high-end drive control, advanced ceramics, and precision actuators. With a 2,500-square-meter industrialization base, its products have been applied in semiconductor lithography, inspection, and other equipment. The core team comes from semiconductor equipment, aerospace, and other industries with rich experience. The company is committed to providing one-stop solutions and services to drive the industrial and technological revolution.
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