PM54.22 Piezoelectric Objective Stage
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Specifications
| Parameter | Value |
|---|---|
| Z-Direction Closed-Loop Travel [Tolerance ±15%] | 200 μm |
| Z-Direction Maximum Travel [Tolerance ±15%] | 250 μm |
| Closed-Loop Sensor | SGS |
| Resolution | 0.35 nm |
| Linearity | 0.1% |
| Repeatability | 20 nm |
| Z-Direction Position Noise | 1 nm |
| θx Angular Crosstalk [Tolerance ±10%] | 20 μrad |
| θy Angular Crosstalk [Tolerance ±10%] | 5 μrad |
| Thrust / Pulling Force [Tolerance ±15%] | 80/20 |
| Capacitance [Tolerance ±15%] | 3.1 μF |
| No-Load Resonant Frequency [Tolerance ±15%] | 500 Hz |
| Resonant Frequency [Tolerance ±15%; Load 150g] | 200 Hz |
| Mass [Tolerance ±5%] | 200 g |
| Cable Length [Tolerance ±5%] | 1.5 m |
| Interface | D-sub 15/D-sub 7W2 |
| Material | Stainless Steel, Aluminum Alloy |
| Operating Temperature | -20~80 °C |
Key Features
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