Precision Metrology Rotary Stage
This precision nested dual-axis air-bearing rotary table is designed for angle measurement. Both axes use ultraprecision air bearings. Combined synchronous and independent motion of the inner and outer axes generates precise angles and highly stable angular rates. Three precision gratings, each with multiple readheads, acquire angles and enable self-calibration. A reliable linear drive/control system is included. Applications listed include height-standard transfer, testing/calibration of inertial devices, and testing/calibration of basic angular encoders such as circular gratings and circular time gratings; the source uses the unclear term 惯性高航器 Items for the inertial devices.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Load Capacity [Inner Axis] | 10kg |
| Angular Displacement Error (PV) [Inner Axis; PV] | 0.2″ |
| Angular Displacement Repeat Positioning Accuracy [Inner Axis] | 0.1″ |
| Homing Error [Inner Axis] | 0.05″ |
| Rate Range [Inner Axis] | 0-100r/min |
| Radial Rotation Error [Inner Axis] | 50nm |
| Rotary-Stage Tabletop [Inner Axis] | φ155mm |
| Position Settling Time [Inner Axis] | ≤2s |
| Load Capacity [Outer Axis] | 50kg |
| Angular Displacement Error (PV) [Outer Axis; PV] | 0.1″ |
| Angular Displacement Repeat Positioning Accuracy [Outer Axis] | 0.05″ |
| Homing Error [Outer Axis] | 0.03″ |
| Rate Range [Outer Axis] | 0-2r/min |
| Radial Rotation Error [Outer Axis] | 50nm |
| Rotary-Stage Tabletop [Outer Axis] | φ320mm |
| Position Settling Time [Outer Axis] | ≤2s |
| Rate Stability [Within a 1° range] | Better than 0.1% |
| Rate Stability [Within a 10° range] | Better than 0.01% |
| Rate Stability [Within a 100° range] | Better than 0.001% |
| Rate Stability [Within a 360° range] | Better than 0.0001% |
| Mounting Tabletop Dimensions | 476mm x 476mm |
| Mounting Method | Flange Mounting or Direct Placement |
| Optional Configuration | Environmental Adaptability Design |
Applications
Key Features
Datasheet
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