Femtosecond Laser Multifocus Holographic Lithography System

Femtosecond Laser Multifocus Holographic Lithography System

Supplier
Oelectron
Category
Semiconductor Manufacturing Equipment
Origin
China

Femtosecond laser multifocus holographic lithography has gained international recognition and several successful U.S. applications… By substantially reducing micro-additive manufacturing costs, FP NanoPrinter enables 3D printing at 30nm resolution and industrial scale multimaterial 3D nanofabrication. This technology opens new possibilities for precision injection molding, optics, biomedicine, chips and metamaterials.

Specification Snapshot
Operating Temperature
23 ± 1 ℃
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Overview

Femtosecond laser multifocus holographic lithography has gained international recognition and several successful U.S. applications… By substantially reducing micro-additive manufacturing costs, FP NanoPrinter enables 3D printing at 30nm resolution and industrial scale multimaterial 3D nanofabrication. This technology opens new possibilities for precision injection molding, optics, biomedicine, chips and metamaterials.

Specifications

ParameterValue
relative humidity< 50% (< 35% Recommended )
Printing TechnologyProjection Lithography
Minimum Feature Size (XY / Z)142 nm* / 175 nm*
Resolution (Diffraction Limit, XY / Z)285 nm* / 500 nm*
Layer Spacing≥0.05µm*
Printing Rate100 mm ³ /hr*
Parallel Writing Foci≥100
Multifocus ControlAny Single Focus Point Editing and Control
Small Surface Roughness≤ 20 nm
Laser SafetyClass 4
SoftwareIncluding
AstraWriteDedicated GUI
Data InputVarious Image Files (.bmp, .stl)
Weight (Without Optical Table)500 kg
Operating Temperature23 ± 1 ℃
Room Illumination≥ 590 nm During Operation Illumination
ParticlesClass 10000
Power Supply220V, > 35 A
Vibration ClassVibration Isolation and Damping Required ; No Vibration Sources in Room
Compressed Air Supply0.55 ±0.03MPa, flow 40 SLPM
Ambient Air Requirements20 cm Range No Noticeable Airflow Within
AltitudeHigh 2500 m

Key Features

A DMD acts as both a dynamic diffraction grating and a programmable mask. Combined spatial and temporal focusing generates light sheets with controlled depth resolution for fast, precise, large area photopolymerization. Femtosecond light sheets move in coordination with a precision translation stage to build complex three dimensional micro/nano structures in photosensitive materials with excellent lateral and axial resolution. Unlike conventional point scanning two photon lithography, FP NanoPrinter exposes areas, producing cross sectional patterns containing many voxels in a single image and greatly improving throughput. Parallel fabrication supports complex geometries including embedded overhangs and layered channels. The described technology simplifies lengthy exposure processes while retaining high resolution and reducing operating costs and energy use. It provides a practical route to large scale micro/nano manufacturing, particularly rapid prototyping, precision device development and customized microstructures on flexible production lines.

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Supplier Information

Oe
Oelectron
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Beijing Optic Electronic Technology Co., Ltd. (Optic Electronic) was founded in 2010. It is a high-tech enterprise focusing on the optoelectronic field, providing domestic scientific research institutions and industrial users with instruments, equipment and overall solutions in optical inspection, micro-nano processing, laser applications and other fields. The company is headquartered in Changping, Beijing, with offices in Shanghai and Guangzhou, serving the whole country. Beijing Optic Electronic Technology Co., Ltd. (Optic Electronic) was founded in 2010 and has been deeply engaged in the optoelectronic field for more than ten years, focusing on introducing and promoting mature and innovative optoelectronic technologies and reliable products from overseas, and providing professional instruments, equipment and supporting services for domestic scientific research institutions and industrial enterprises. Its products cover optical inspection and analysis, laser and micro-nano processing, semiconductor packaging inspection, physical property analysis, and special optical fibers and crystals, and are widely used in semiconductor manufacturing, materials science, biomedicine, university research and national defense.

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