Maskless DLP Projection Lithography System
The UTA microscope LED exposure unit is a maskless pattern projection device for photolithography. A metallurgical microscope and LED DLP projector expose arbitrary patterns at micrometer resolution on resist coated substrates. Patterns can be freely created on a PC. Electrodes can be formed on single crystal flakes of various sizes and shapes under ordinary indoor conditions. The process is cheaper and simpler than electron beam lithography and eliminates expensive electrode pattern masks.
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Overview
Specifications
| Parameter | Value |
|---|---|
| min scale | 1 μm |
| Exposure Range | max:2.5mm×1.5mm; min:100μm×60μm |
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