Beam-Splitting DOE ODS2X309S8-1064
JCOPTIX beam-splitting DOEs use microstructures etched into quartz or other materials to modulate the incident spot and split a single input beam into multiple output beams. Their multilevel design and antireflection coating provide high transmission and diffraction efficiency at the operating wavelength. Applications include laser scribing of solar cells, displays and panels; laser welding, cutting, and drilling; dot-pattern generation for 3D sensing and machine vision; and infrared depth detectors. JCOPTIX can customize output beam count, array, operating wavelength, separation angle, and energy-distribution uniformity. Contact technical support for custom requirements. Quartz beam-splitting DOEs, material: UVFS. Applicable models: ODS2X2067S2-355, ODS2X2067S4-355, ODS2X2067S8-355, ODS2X3045S2-532, ODS2X3045S8-532, ODS2X309S2-1064, ODS2X309S8-1064. Operating wavelengths: 355 nm, 532 nm, 1064 nm. Splitting patterns: 2×2, 2×3. Uniformity: >98%. Custom operating wavelengths, splitting patterns, and separation angles are available. JCOPTIX UV fused-silica beam-splitting DOEs operate at wavelengths including 355 nm, 532 nm, and 1064 nm, splitting a single input into multiple outputs. The multilevel design and antireflection coating provide high transmission and uniform splitting at the operating wavelength. Output beam count, array, wavelength, separation angle, and energy-distribution uniformity can be customized; contact support. Technical notes (page-level manufacturing capabilities and examples, retained as sourced). 1. Minimum grating period? The grating period is expressed as d=λ/sin θ. It is determined by the design wavelength and splitting angle: a shorter wavelength and larger angle between adjacent split beams produce a smaller period. One beam-splitter DOE period contains multiple micro/nanostructures that perform splitting. The figure below shows a typical period. The smallest pattern dimension within it, or minimum feature size, is important in determining manufacturability. Minimum-feature manufacturing capability is 1μm. Figure 1. Typical beam-splitting DOE period. Different split counts have different minimum feature sizes. The simplest structure, a 1×2 splitter, is shown in Figure 2. With a 1 μm minimum feature, the 1×2 splitter minimum period is 2 μm. Figure 2. 1×2 splitter period. Other splitting DOEs have complex patterns within each period; their minimum periods require specific design assessment based on wavelength, split count, and the fractional angle (source wording). 2. Etching resolution and accuracy? Minimum linewidth: 1 μm ± 50 nm; depth error: ±10 nm. 3. Maximum diffraction angle? Essentially the same issue as 1: a larger angle means a smaller period and minimum feature. The current maximum diffraction angle for manufactured beam-splitting DOEs is 30°. 4. Maximum diffraction-region size? The largest currently manufacturable diffractive-optic aperture is 400mm for two-level devices; the maximum multilevel size is 6 cun (source unit). 5. Operating wavelength range? Diffractive optics generally operate at a single wavelength. Various types can be manufactured from UV 193 nm to long-wave IR 10.6μm. 6. Residual zero order? The designed zero order can be 0. Sensitivity to tolerances varies with angle and splitting configuration. For example, for a 1×4 splitter with a total splitting angle of 5°, manufactured residual zero order can be kept below 0.03%.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Dimensions | Ø25.4 mm |
| Thickness | 3 mm |
| Surface Quality (Scratch / Dig) | Diffraction Region 40/20, Nondiffraction Region 60/40 |
| Element Material | UV Fused Silica |
| Beam Splitting Mode | 2 × 3 |
| Angular Separation Between Adjacent Beams | 0.9° × 0.52° |
| Number of Steps | 8 |
| Uniformity | > 98% |
| Input Beam Dimensions [1/e2] | > 0.6 mm |
| Clear Aperture Dimension | 15 mm × 15 mm |
| Diffraction Efficiency | ≥ 85% |
| Operating Wavelength | 1064 nm |
| Transmittance (@ Operating Wavelength) [@ Operating Wavelength; @ Operating Wavelength)] | > 98% |
| General Parameters - Material | UV Fused Silica |
Key Features
Datasheet
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