A-P5ALS-200.90.360U200.200.A

A-P5ALS-200.90.360U200.200.A

Supplier
Nano-stage
Category
Manual Stages
Origin
China

Precision five-axis coordinated motion. P5ALS-AB is a new 5-axis system for the source-described unresolved requirements of precision 5-axis machining/inspection. Natural granite beds, integrated welded frames and air-bearing isolators suppress external vibration. Linear axes combine air bearings and linear motors; precision direct-drive AC axes provide high spatial accuracy. RTCP tool-tip-following control supports specialized trajectory computation and control.

Specification Snapshot
Maximum Speed [X Axis]
500mm/s
Maximum Speed [Y Axis]
500mm/s
Maximum Speed [Z Axis]
500mm/s
Maximum Speed [θX Axis (A Axis)]
90deg/sec
Maximum Speed [θZ Axis (C Axis)]
360deg/sec
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Overview

Precision five-axis coordinated motion. P5ALS-AB is a new 5-axis system for the source-described unresolved requirements of precision 5-axis machining/inspection. Natural granite beds, integrated welded frames and air-bearing isolators suppress external vibration. Linear axes combine air bearings and linear motors; precision direct-drive AC axes provide high spatial accuracy. RTCP tool-tip-following control supports specialized trajectory computation and control.

Specifications

ParameterValue
Effective Travel [X Axis]±100mm
Effective Travel [Y Axis]±100mm
Effective Travel [Z Axis]±100mm
Effective Travel [θX Axis (A Axis)]±45deg
Effective Travel [θZ Axis (C Axis)]360deg
Motor type [X Axis]Linear Motor
Motor type [Y Axis]Linear Motor
Motor type [Z Axis]Linear Motor
Motor type [θX Axis (A Axis)]DD Motor with Speed Reducer
Motor type [θZ Axis (C Axis)]DD Motor with Speed Reducer
Guide Rail Type [X Axis]Air-Bearing Guide
Guide Rail Type [Y Axis]Air-Bearing Guide
Guide Rail Type [Z Axis]Crossed-Roller Guide
Guide Rail Type [θX Axis (A Axis)]Crossed-roller bearing ring
Guide Rail Type [θZ Axis (C Axis)]Crossed-roller bearing ring
Grating resolution [X Axis]10nm Absolute, BISS-C Protocol
Grating resolution [Y Axis]10nm Absolute, BISS-C Protocol
Grating resolution [Z Axis]10nm Absolute, BISS-C Protocol
Grating resolution [θX Axis (A Axis)]32-Bit Absolute Grating Encoder, BISS-C Protocol
Grating resolution [θZ Axis (C Axis)]32-Bit Absolute Grating Encoder, BISS-C Protocol
Minimum Step Size [X Axis]50nm
Minimum Step Size [Y Axis]50nm
Minimum Step Size [Z Axis]50nm
Minimum Step Size [θX Axis (A Axis)]1ec
Minimum Step Size [θZ Axis (C Axis)]1ec
Positioning Repeatability (Single Axis) [X Axis]±0.25um
Positioning Repeatability (Single Axis) [Y Axis]±0.25um
Positioning Repeatability (Single Axis) [Z Axis]±0.25um
Positioning Repeatability (Single Axis) [θX Axis (A Axis)]±0.5sec
Positioning Repeatability (Single Axis) [θZ Axis (C Axis)]±0.5sec
Positioning Accuracy (Single Axis) [X Axis]±0.5um
Positioning Accuracy (Single Axis) [Y Axis]±0.5um
Positioning Accuracy (Single Axis) [Z Axis]±0.5um
Positioning Accuracy (Single Axis) [θX Axis (A Axis)]±3sec
Positioning Accuracy (Single Axis) [θZ Axis (C Axis)]±3sec
Maximum Speed [X Axis]500mm/s
Maximum Speed [Y Axis]500mm/s
Maximum Speed [Z Axis]500mm/s
Maximum Speed [θX Axis (A Axis)]90deg/sec
Maximum Speed [θZ Axis (C Axis)]360deg/sec
Maximum loadZ-Axis Adjustable Load Range 1–30kg, Maximum Load at AC-Axis End 40kg
Maximum MassComplete Unit Weight 1600kg

Applications

Optical Inspection, Synchrotron Radiation, High-Precision Automation, Precision Machining and Inspection

Key Features

The XY axes use aerostatic guides for excellent straightness, flatness, pitch, and yaw, fundamental to high spatial positioning accuracy. All axes of the 5-axis system use absolute optical encoders for immediate operation after power-up, eliminating incremental-encoder homing time and greatly reducing errors. The Z axis uses a high-performance linear motor, an adjustable load-balancing system, and a brake for greater motion reliability and safety. The AC axes use high-precision direct-drive motors and reducers for accurate motion, sufficient torque, and stable final positioning. Higher-precision air-bearing rotary tables or spindles are optional. ACS motion control is recommended by default, supporting RTCP tool-center tracking, simultaneous five-axis motion, and GCODE, with excellent control and development extensibility. BECKHOFF or other systems supporting simultaneous 5-axis motion are optional. Multiaxis customization is supported.

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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