HS1 Nanopositioning Stage HS1.30
The HS1 is a compact nanopositioning stage that can be combined into 2-axis or even 3-axis nanopositioning systems. It offers travel ranges of 10, 30, 50, 70 or 100 microns and is also available with an aperture; see HS1H. This stage is part of our high-speed product line, with a high-power controller available.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Range of motion | 30 µm |
| Resolution | 0.03 nm |
| Noise floor | typical:0.003 nm |
| Repeatability | 0.06 nm |
| Linearization | typical:0.02% |
| Resonant frequency | 4000 Hz |
| Stiffness | 3 N/µm |
| Sensor | Silicon HR Sensor |
| Size W x L x H | 62.5 mm × 69.5 mm × 12.6 mm |
| Material | Aluminium |
| Cable length | 2 m |
| Controller | Standard or High Speed |
| Maximum load* [Horizontal use] | 1 kg |
| Maximum load* [Vertical use] | 0.5 kg |
Datasheet
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Supplier Information
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