High Speed Nano Scanning Stage NPV-CXX
High Speed Nano Scanning Stage Based on Voice Coil Motor Drive and High Precision Orientation Module Positioning nanoscale super-high resolution / Scan Line Movement , Internal Grating Offset Sensor , The structure is tight. , Excellent closed-ring control through self-developed high-performance nanoserving systems , He's got nanoscale motion resolution and motion accuracy. , And it's also high speed. 、 High Dynamic Performance Positioning and Scan function 。 Support product development and development for different applications and needs Custom 。
Specification Snapshot
Sensor Type
Grating Sensor
Resolution
1.22 nm
Repeatability
5 nm
Travel
±10 mm
Dimensions
90 mm × 111.83 mm × 62 mm
Operating Temperature
10-50 ℃
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Overview
High Speed Nano Scanning Stage Based on Voice Coil Motor Drive and High Precision Orientation Module Positioning nanoscale super-high resolution / Scan Line Movement , Internal Grating Offset Sensor , The structure is tight. , Excellent closed-ring control through self-developed high-performance nanoserving systems , He's got nanoscale motion resolution and motion accuracy. , And it's also high speed. 、 High Dynamic Performance Positioning and Scan function 。 Support product development and development for different applications and needs Custom 。
Specifications
| Parameter | Value |
|---|---|
| Axis | Z |
| Sensor Type | Grating Sensor |
| Drive Type | Voice Coil Motor |
| Channel Frequency | ≤20 Hz |
| Maximum Load | 800 g |
| Resolution | 1.22 nm |
| Repeatability | 5 nm |
| Travel | ±10 mm |
| Dimensions | 90 mm × 111.83 mm × 62 mm |
| Operating Temperature | 10-50 ℃ |
| Material | Aluminum Alloy / Titanium Alloy |
| Operating Temperature (mBar) | Super vacuum compatible. (5X10-9 ) |
| Recommendations Controller / Driver | NPC-032 |
Applications
Optical system Lens Positioning Precision electrode tubes in medical devices 、 Vacuum tube control Multi-coordinate positioning platform for mechanical tools Soft robots that fast and precisely locate the unended implementer
Key Features
Super tall. Positioning Accuracy High Dynamic Performance Feature Multimotor Mode : Positioning / Scan A long journey.
Datasheet
Product Datasheet
PDF
Supplier Information
Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions.
The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.
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