Six Axis Nano Scanning Stage NP-ST-6CD
NP-ST-6CD Six Axis Nano. Scanning Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity ， Closed loop control through high performance nanoserve system ， is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Track scan 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | X, Y, Z, θX, θY,θZ |
| Sensor Type | Capable Sensors |
| Drive Type | Piezoelectric Ceramic |
| Closed cycle | X/Y/Z: 200 μm θX/θY/θZ: ±0.5mrad |
| Closed circle resolution | X/Y/Z: 1 nm θX/θY/θZ: 0.1 μrad |
| Linear Error | X/Y/Z: 0.01 % θX/θY/θZ: 0.1% |
| Repeatability | X/Y/Z: ±2 nm θX/θY/θZ: ±0.1/ ±0.1/ ±0.15 μrad |
| X/Y/Z Up-board airborne balconies frequency | 110/110/200 |
| Maximum Load | 5 kg |
| Dimensions | 150 mm × 150 mm × 30 mm |
| Vacuum （mbar）（ Optional ） | Super vacuum compatible. （5x10⁻⁹） |
| Material | Aluminum Alloy |
| Operating Temperature | 0~50 ℃ |
| Fit Controller | Digital Servo Controller NPC043 |
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