Single Axis Long Travel Nano Motion Stage NH-X-200A
NH-X-200A Single Axis Long Travel Piezoelectric Translation Stage Based on the principle of slimy biomixing and the whole thing. / - A step-by-step complex nanomotor technology. , Dozens of centimetres of travel and nano-sport accuracy. 。
Specification Snapshot
Sensor Type
Grating Encoder ( Steel belt fence )
Travel
200 mm
Resolution
1.22 nm
Straightness
4 μm
Linearity
0.0003%
Dimensions
310 mm × 90 mm × 40 mm
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Overview
NH-X-200A Single Axis Long Travel Piezoelectric Translation Stage Based on the principle of slimy biomixing and the whole thing. / - A step-by-step complex nanomotor technology. , Dozens of centimetres of travel and nano-sport accuracy. 。
Specifications
| Parameter | Value |
|---|---|
| Number of motion axes | 1 |
| Sensor Type | Grating Encoder ( Steel belt fence ) |
| Travel | 200 mm |
| Hold on. (Force) | 8 N |
| Maximum Load | 20( Vertical ) |
| Drive Type | Piezoelectric Ceramic |
| Power loss. | 13 N |
| Resolution | 1.22 nm |
| Minimum Step length | 2 nm |
| Flatness | 5 μm |
| Straightness | 4 μm |
| Linearity | 0.0003% |
| - A little bit. yaw(μrad/mm) | 5 |
| Dimensions | 310 mm × 90 mm × 40 mm |
| Self Weight | 1280 g |
| Operating Temperature | 10-50 ℃ |
| Speed | 6 mm/s |
| Material | Aluminum Alloy / Titanium Alloy |
| Vacuity (mBar) | Super vacuum compatible. (7X10-7 ) |
| Recommendations Controller / Driver | SS01-C2A |
Applications
Scan the mirror. (SEM) Sample Manipulation Active Optical Move the ultra-resolution image sample Wide-range electronic beams in a straight print (EBL) Weiner equipment and manufacture Integrated circuit manufacturing and detection High vacuum sample accuracy and alignment Nanofocus and scan Micro and nano CT
Key Features
A long journey. :200mm High Resolution : Sensor Resolution 1.22nm Speed of motion : Katar 6mm/s High stability : Keep your strength up. 25N Super-high vacuum compatibility ; Motion Mode : Support for open and closed rings LightQuantification 、 The structure is tight. , High reliability Modular design , The friction unit is replaced
Datasheet
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Supplier Information
Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions.
The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.
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