Single Axis Long Travel Nano Motion Stage NH-X-200A

Single Axis Long Travel Nano Motion Stage NH-X-200A

Supplier
Attomotion
Part Number
NH-X-200A
Category
Motorized Stages
Origin
China

NH-X-200A Single Axis Long Travel Piezoelectric Translation Stage Based on the principle of slimy biomixing and the whole thing. / - A step-by-step complex nanomotor technology. , Dozens of centimetres of travel and nano-sport accuracy. 。

Specification Snapshot
Sensor Type
Grating Encoder ( Steel belt fence )
Travel
200 mm
Resolution
1.22 nm
Straightness
4 μm
Linearity
0.0003%
Dimensions
310 mm × 90 mm × 40 mm
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Overview

NH-X-200A Single Axis Long Travel Piezoelectric Translation Stage Based on the principle of slimy biomixing and the whole thing. / - A step-by-step complex nanomotor technology. , Dozens of centimetres of travel and nano-sport accuracy. 。

Specifications

ParameterValue
Number of motion axes1
Sensor TypeGrating Encoder ( Steel belt fence )
Travel200 mm
Hold on. (Force)8 N
Maximum Load20( Vertical )
Drive TypePiezoelectric Ceramic
Power loss.13 N
Resolution1.22 nm
Minimum Step length2 nm
Flatness5 μm
Straightness4 μm
Linearity0.0003%
- A little bit. yaw(μrad/mm)5
Dimensions310 mm × 90 mm × 40 mm
Self Weight1280 g
Operating Temperature10-50 ℃
Speed6 mm/s
MaterialAluminum Alloy / Titanium Alloy
Vacuity (mBar)Super vacuum compatible. (7X10-7 )
Recommendations Controller / DriverSS01-C2A

Applications

Scan the mirror. (SEM) Sample Manipulation Active Optical Move the ultra-resolution image sample Wide-range electronic beams in a straight print (EBL) Weiner equipment and manufacture Integrated circuit manufacturing and detection High vacuum sample accuracy and alignment Nanofocus and scan Micro and nano CT

Key Features

A long journey. :200mm High Resolution : Sensor Resolution 1.22nm Speed of motion : Katar 6mm/s High stability : Keep your strength up. 25N Super-high vacuum compatibility ; Motion Mode : Support for open and closed rings LightQuantification 、 The structure is tight. , High reliability Modular design , The friction unit is replaced

Datasheet

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Supplier Information

At
Attomotion
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Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions. The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.

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Single Axis Long Travel Nano Motion Stage NH-X-200A
Attomotion · Motorized Stages
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