High Precision Wafer Alignment Platform NV-XYR-10B
High Precision Wafer Alignment Platform Adopt Voice Coil Motor Direct Drive AND THE CONCLUSION OF THE MACHINE STRUCTURE , We're fast. 、 High 、 Advantages such as strong carrying capacity 。 Inline super-precision Grating Porting sensors to complete closed ringup control , Motion Resolution <50nm, Repeatability <100nm, Meet the industrial line. High Precision 、 High frequency pair 、 Tie 、 Match 、 Application needs such as assemble 。 Support product development and development for different applications and needs Custom 。
Save to Favorites
Overview
Specifications
| Parameter | Value |
|---|---|
| Axis | X/Y/R |
| Sensor Type | Grating Sensor |
| Drive Type | Voice Coil Motor |
| Closed cycle | ±10 mm |
| Distortion angle | ±3 ° |
| Closed circle resolution | 12.5 nm |
| Repeatability | 100 nm |
| Dimensions | 353 mm × 353 mm × 95 mm |
| Self Weight | 17 kg |
| None Loading tuned frequency | 160 Hz |
| Maximum Load | 10 kg |
| Recommendations Controller / Driver | NPC-032 |
Applications
Key Features
Datasheet
Supplier Information
Related Products
-
AS11075-XY Motorized XY Scanning Stage
Motorized Stages
Oeabt
Specifications: 281.0 mm × 252.8 mm × 32.3 mm Total travel: 110mm(X axis)*75mm(Y axis) Max Load: 1kg
The automated, high-precision four-inch two-axis stage provides a large 110*75mm XY travel range for microscopy, industrial inspection and precision processing.
-
AS11075-XY Motorized XY Scanning Stage OM-4X
Motorized Stages
Oeabt
Specifications: Four-Axis Motion Controller/Driver
The automated, high-precision four-inch two-axis stage provides a large 110*75mm XY travel range for microscopy, industrial inspection and precision processing.
-
AS11075-XY Motorized XY Scanning Stage OM-4CP
Motorized Stages
Oeabt
Specifications: Four-Axis Motion-System Hand Controller
The automated, high-precision four-inch two-axis stage provides a large 110*75mm XY travel range for microscopy, industrial inspection and precision processing.
-
AS11075-XY Motorized XY Scanning Stage OSMC-1U
Motorized Stages
Oeabt
Specifications: 76.0 mm × 74.2 mm × 47.0 mm Weight: 183.5g
The automated, high-precision four-inch two-axis stage provides a large 110*75mm XY travel range for microscopy, industrial inspection and precision processing.
-
LMTS Series Stepper-Motor Translation Stage LMTS-D28
Motorized Stages
Oeabt
Specifications: 253.0 mm × 70.0 mm × 24.0 mm Travel: 28mm Actuator Type: 28BYG-B Motor with Shaft Outputs at Both Ends
LMTS-series motorized linear translation stages provide 28mm travel and are optimized for moderate loads and high-resolution measurement and inspection. Special microstepping design enables smaller, smoother low-speed movements with less vibration noise than DC servomotors.
Related Articles
Fomoptic delivers integrated one‑stop optical solutions covering precision optical fabrication and custom vacuum coating services. Supported by complete processing production lines, comprehensive metrology equipment and experienced engineering team, we provide full‑chain customized components, ranging from blank shaping, ultra‑precision polishing to thin‑film coating, for laser systems, infrared imaging, industrial optics and scientific‑research projects.
Fiber lasers and fiber amplification systems require excitation sources with stable wavelength, narrow spectral linewidth and consistent output power.
For pulsed laser and full-spectrum optical testing, photodiodes and thermopiles have inherent drawbacks. Photodiodes show weak response in infrared band, while thermopiles feature slow response and cannot capture nanosecond narrow pulses.
As a professional ultraviolet‑laser solution provider, Precilasers has launched its 266 nm narrow‑linewidth industrial laser, delivering reliable single‑frequency output for high‑precision interference lithography, semiconductor inspection and precision metrology applications.
Loading...
Name
Phone
Organization
Use Case
Database Platform