Inertial Motor H-IM Series Six Degree of Freedom Parallel Motion Platform HEXAPOD H-IM-86*
Inertial Motor H-IM Series Six Degree of Freedom Parallel Motion Platform Multi-Liberal Movement ， Dynamic Large range ， Carrying large stability ， Any Center to Move ， Meeting various industrial needs ， Adaptation to atmosphere and vacuum 。 Extensively applied to micro-managing 、 Biotechnology 、 Semiconductor Manufacturing etc. 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | X, Y, Z, θX, θY,θZ |
| Sensor Type | Grating Sensor |
| Drive Type | Piezoelectric Ceramic |
| Closed cycle | X/Y/Z:10/10/6mm θX/θY/θZ:±3°/±3°/±2° |
| Minimum Offset Incremental | Z:5nm θX/θY:15/15 μ° |
| Maximum Speed | Z:4mm/s θX/θY:1.5/1.5 °/s |
| Maximum Load | 3 N |
| Material | Aluminum Alloy |
| Dimensions | Φ175 mm × 86.58 mm |
| Quality | 1.12 kg |
| Operating Temperature | 0-50 ℃ |
Applications
Key Features
Datasheet
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