Capacitive Microdisplacement Sensor PC06-100
Capacitive Microdisplacement Sensor Accurate measurements of nanoscale shifts based on changes in the capacity of the capacity of the electron-ecosystem field at the time of the change 。 The Series The product achieves non-contact measurements , It's got a very high resolution. 、 Linearity and high-measured bandwidth , Meeting the measurement needs of nanoscales in various applications , Being able to work under harsh environmental conditions 。
Specification Snapshot
Sensor Type
Capable
Diameter
6 mm
Length
12 mm
Resolution
0.02 nm
Resolution
0.04 nm
Resolution
0.14 nm
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Overview
Capacitive Microdisplacement Sensor Accurate measurements of nanoscale shifts based on changes in the capacity of the capacity of the electron-ecosystem field at the time of the change 。 The Series The product achieves non-contact measurements , It's got a very high resolution. 、 Linearity and high-measured bandwidth , Meeting the measurement needs of nanoscales in various applications , Being able to work under harsh environmental conditions 。
Specifications
| Parameter | Value |
|---|---|
| Sensor Type | Capable |
| Diameter | 6 mm |
| Detective area diameter | 2.3 mm |
| Length | 12 mm |
| Measurement | 100 um |
| Resolution | 0.02 nm |
| Resolution | 0.04 nm |
| Resolution | 0.14 nm |
| Resolution | 0.39 nm |
| Linearity | 0.015 % |
| Default bandwidth | 2 kHz |
| Repeatability | 0.21 nm |
| Operating Temperature Scope | -20~100 ℃ |
| Material | Aluminum 6061/Invar 36/Stainless steel 316/Super invar 32-5 |
| Vacuum ( Optional ) | Super vacuum compatible. (5X10-9 ) |
| Fit Controller | Micro Single Channel Sensor Main Unit CDM100S Three Channel Sensor Main Unit CDM300 Six Channel Sensor Main Unit CDM600 |
Applications
Nanometric motion measurements Precision optical manufacture Super precision machine bed. Superprecision facial measurements Microflex deformation measurements Integrated circuit manufacturing
Key Features
Measurement Range from Hundreds to Thousands of Micrometers Super. High Precision ( Pomeche-scale limit resolution )、 Highlineality 、 Low drift Highbandwidth High Dynamic Performance Measurement Special circumstances such as vacuum and space Custom
Datasheet
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Supplier Information
Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions.
The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.
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