STORM 5000 ®Retial Disorder Detection Device
STORM 5000 is a graphic defects detection device for the 4th generation of the mimics, which builds on the technological accumulation and success of STORM 3000 and further upgrades in optical imaging, algorithms, algorithms, etc. to meet higher-scale mask manufacturing; supports PSM, Binary mask testing, and adapts the technical nodes of the ArF to KrF.
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Overview
STORM 5000 is a graphic defects detection device for the 4th generation of the mimics, which builds on the technological accumulation and success of STORM 3000 and further upgrades in optical imaging, algorithms, algorithms, etc. to meet higher-scale mask manufacturing; supports PSM, Binary mask testing, and adapts the technical nodes of the ArF to KrF.
Applications
Provide efficient reticle testing for Mask shop and crystal round manufacturing
Key Features
– Superhigh resolution optical systems based on deep UV DUV lasers – support for reflector light, perceiving light simultaneously detection – support for DD, SL, DB testing models – support for RSP 150/200 boxes – support for GDS, OASIS, MEBES file formats – support for OPS graphics testing – support for GPU distribution calculations
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Supplier Information
VPTEK is a manufacturer of automated optical inspection equipment in the semiconductor manufacturing field. VPTEK's solutions can meet the demanding defect inspection requirements in semiconductor wafer and semiconductor mask manufacturing processes. The products are applied in pan-semiconductor, CMOS image sensor, MEMS and RF fields, serving industry-leading FABs, IDMs, OSATs and foundries. VPTEK adheres to the path of localization, independently develops key technologies, fills the gap in domestic high-end inspection equipment, and helps the development of China's integrated circuit industry.
Guided by the innovative passion, years of concerted efforts and win-win cooperation of VPTEK people, VPTEK has become a rapidly growing semiconductor defect inspection equipment enterprise, winning the trust and support of many customers and suppliers.
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