STORM 3000U ® Mask Baseboard Test Device
STORM 3000U is a next-generation IC Mask substrate-defect inspection system based on the established STORM 3000 architecture. Optimized optical imaging, transport and buffering improve usability and reduce cost. For Mask Blank production, outgoing inspection and Mask-shop incoming inspection, it targets 200nm detection accuracy with high efficiency, easy operation and low cost.
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Overview
STORM 3000U is a next-generation IC Mask substrate-defect inspection system based on the established STORM 3000 architecture. Optimized optical imaging, transport and buffering improve usability and reduce cost. For Mask Blank production, outgoing inspection and Mask-shop incoming inspection, it targets 200nm detection accuracy with high efficiency, easy operation and low cost.
Applications
Provide efficient and low-cost testing programmes for IC Mask base plate manufacture and IC Mask shop testing
Key Features
– The laser-based super-high resolution optical system – supporting the automatic ups and downs of SMIF Pod – supporting particle, cut, needle, dirty pollution detection – supporting automatic reveiew and defective classification – supporting the polishing panels, chromium panels and modulus — supporting the automatic tectonic and cache of the base plate
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Supplier Information
VPTEK is a manufacturer of automated optical inspection equipment in the semiconductor manufacturing field. VPTEK's solutions can meet the demanding defect inspection requirements in semiconductor wafer and semiconductor mask manufacturing processes. The products are applied in pan-semiconductor, CMOS image sensor, MEMS and RF fields, serving industry-leading FABs, IDMs, OSATs and foundries. VPTEK adheres to the path of localization, independently develops key technologies, fills the gap in domestic high-end inspection equipment, and helps the development of China's integrated circuit industry.
Guided by the innovative passion, years of concerted efforts and win-win cooperation of VPTEK people, VPTEK has become a rapidly growing semiconductor defect inspection equipment enterprise, winning the trust and support of many customers and suppliers.
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