STORM 3000 ®Retial Disorder Detection Device
STORM 3000, a third generation IC Mask test product, has been tested and continuously improved over the years. STORM 3000 has been accredited by industry’s head-clients. STORM 3000 is based on advanced laser imaging techniques and high sensitivity software algorithms with testing models such as DB, DD, SL, which apply to Mask Shop, FAB’s needs for photo masks production processes, delivery and periodic testing, with significant advantages such as high precision, efficiency and ease of use.
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Overview
STORM 3000, a third generation IC Mask test product, has been tested and continuously improved over the years. STORM 3000 has been accredited by industry’s head-clients. STORM 3000 is based on advanced laser imaging techniques and high sensitivity software algorithms with testing models such as DB, DD, SL, which apply to Mask Shop, FAB’s needs for photo masks production processes, delivery and periodic testing, with significant advantages such as high precision, efficiency and ease of use.
Applications
Provide efficient reticle testing for Mask shop and crystal round manufacturing
Key Features
– Super-high resolution optical systems based on UV lasers – support for reflector light, penetrating light simultaneously detection – support for DD, SL, DB testing models – support for SMF Pod, Nikon CASE, Canon CASE and Shipping Box – support for GDS, OASIS, MEBES file formats – support for OPS correction – support for GPU distribution calculations
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Supplier Information
VPTEK is a manufacturer of automated optical inspection equipment in the semiconductor manufacturing field. VPTEK's solutions can meet the demanding defect inspection requirements in semiconductor wafer and semiconductor mask manufacturing processes. The products are applied in pan-semiconductor, CMOS image sensor, MEMS and RF fields, serving industry-leading FABs, IDMs, OSATs and foundries. VPTEK adheres to the path of localization, independently develops key technologies, fills the gap in domestic high-end inspection equipment, and helps the development of China's integrated circuit industry.
Guided by the innovative passion, years of concerted efforts and win-win cooperation of VPTEK people, VPTEK has become a rapidly growing semiconductor defect inspection equipment enterprise, winning the trust and support of many customers and suppliers.
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