Tornado 3000 Crystal Circle Surface Deficiencies Detection Device
Tornado 3000 is a micro-scale 8-12 inches of crystal-round fully automated optical detection device introduced by Whip to adapt to more demanding process requirements, based on the maturity structure of Tornado 2000, through further upgrading and optimization of optical systems.
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Overview
Tornado 3000 is a micro-scale 8-12 inches of crystal-round fully automated optical detection device introduced by Whip to adapt to more demanding process requirements, based on the maturity structure of Tornado 2000, through further upgrading and optimization of optical systems.
Applications
2D, 3D defects detection for 8-, 12-inch crystal circle front, medium and advanced containment
Key Features
– Support for 8-inch feeder methods such as SMIF, 12-inch FOUP and Open Cassette — Double-Ray Line + Face-Scanning System, Rapid Scanning — UV-based optical systems that better capture micro-defects — support hardware, software, multiple automatic focus models, ensure accuracy of detection of large arc crystals — support for multi-Roi, multi-tectrographic sub-district detection — support for D2D, D2G, D2DB detection algorithms — support for AI's deficiency detection and classification — support for interface with client MES data
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Supplier Information
VPTEK is a manufacturer of automated optical inspection equipment in the semiconductor manufacturing field. VPTEK's solutions can meet the demanding defect inspection requirements in semiconductor wafer and semiconductor mask manufacturing processes. The products are applied in pan-semiconductor, CMOS image sensor, MEMS and RF fields, serving industry-leading FABs, IDMs, OSATs and foundries. VPTEK adheres to the path of localization, independently develops key technologies, fills the gap in domestic high-end inspection equipment, and helps the development of China's integrated circuit industry.
Guided by the innovative passion, years of concerted efforts and win-win cooperation of VPTEK people, VPTEK has become a rapidly growing semiconductor defect inspection equipment enterprise, winning the trust and support of many customers and suppliers.
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