Active Vibration Isolation Spring
The active vibration isolation spring is an actuator in an active vibration isolation system and operates together with an HAC controller. After receiving compensation signals from the controller, it generates opposing forces to cancel low-frequency vibration, compensating for the limited low-frequency damping of passive isolation units. The product has a compact structure and stable load-bearing capacity. It is primarily used in optical inspection, semiconductor equipment and precision measuring instruments with demanding vibration control requirements. As the actuator of a complete active isolation system, the spring must operate together with the HAC high-precision active vibration isolation controller. Vibration sensors acquire disturbance signals and transmit them to the controller for calculation. The spring then receives control instructions and rapidly generates dynamic compensation forces to actively cancel low-frequency ground vibration, addressing the insufficient low-frequency isolation efficiency of conventional passive air springs. The product has an integrated metal housing with high overall rigidity. Standard mounting-hole arrays on the mounting surface facilitate direct attachment of optical tables and precision equipment. Standardized electrical interfaces on the side allow rapid wiring and commissioning with the control system. The equipment provides fast response and high dynamic compensation accuracy, continuously delivering stable vibration-damping drive forces. The actuator is widely used in research laboratories and high-end manufacturing with equipment such as transmission electron microscopes, laser lithography systems and high-precision three-dimensional inspection instruments, providing extremely stable operating support for precision equipment.
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