Voice-Coil Fast Steering Mirror FSM-780.02 Series FSM-780.02.015.OPT
The voice-coil fast steering mirror combines a voice-coil motor module with a flexure hinge structure and a metal housing, and provides mechanical mounting and load mounting interfaces. It can directly drive a load for small-angle adjustment, with a clamping mechanism on its moving surface to secure the load. It can also be integrated into various types of high-precision equipment to provide microradian-level motion control, optical path control, and related functions.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Standard Load | 80 mm × 60 mm × 8 mm |
| Customizable Load [Customizable ； Custom] | ≤Ф80×8mm |
| Mechanical Deflection Angle | ≥±1.5° |
| Number of Deflection Axes | 2轴 |
| Built-In Sensor | Photoelectric sensor |
| Closed-Loop Resolution | ≤1 μrad |
| Repeatability | ≤4μrad |
| Closed-Loop Bandwidth [500μrad] | ≥350Hz@500μrad |
| Linearity [Linearity After Calibration] | ≤0.05%F.S |
| Distance from Rotation Axis to Reflecting Surface [Varies with load thickness] | 18mm |
| Overall Dimensions | 80 mm × 80 mm × 55 mm |
| Weight [Standard Load] | ≤600g (standard load) |
Datasheet
Supplier Information
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