Specifications
| Parameter | Value |
|---|---|
| Specification Range [Processing Capability ; Product Name : Single-Crystal Silicon Mirror] | D2-D600 |
| Surface Figure [Processing Capability ; Product Name : Single-Crystal Silicon Mirror ; Specification Range :D2-D600 MM] | PV1/10 |
| RMS [Processing Capability ; Product Name : Single-Crystal Silicon Mirror ; Specification Range :D2-D600 MM] | RMS 1/50 |
| Surface Finish [Processing Capability ; Product Name : Single-Crystal Silicon Mirror ; Specification Range :D2-D600 MM] | 20-10 |
| Angle ( Parallelism ) [Processing Capability ; Product Name : Single-Crystal Silicon Mirror ; Specification Range :D2-D600 MM] | ±30′ |
| Surface Figure [Product Description ; Product Name : Single-Crystal Silicon Mirror ; Specifications :100*120*10 MM] | PV1/10 |
| RMS [Product Description ; Product Name : Single-Crystal Silicon Mirror ; Specifications :100*120*10 MM] | RMS 1/50 |
| Surface Finish [Product Description ; Product Name : Single-Crystal Silicon Mirror ; Specifications :100*120*10 MM] | 20-10 |
| Angle ( Parallelism ) [Product Description ; Product Name : Single-Crystal Silicon Mirror ; Specifications :100*120*10 MM] | ±30′ |
| Material [Detailed Table Name: Silicon Optic; Specification: 100*120*10] | Silicon |
| Dimension Tolerance [Detailed Table Name: Silicon Optic; Specification: 100*120*10] | +0.00/-0.1mm |
| Thickness Tolerance [Detailed Table Name: Silicon Optic; Specification: 100*120*10] | ±0.05mm |
| Parallelism [Detailed Table Name: Silicon Optic; Specification: 100*120*10] | 30″ |
| Surface Figure [Detailed table name: silicon mirror; specification: 100*120*10; 633nm] | PVλ/6@633nm |
| RMS [Detailed table name: silicon mirror; specification: 100*120*10; 633nm] | λ/30@633nm |
| Surface Finish [Detailed Table Name: Silicon Optic; Specification: 100*120*10] | 40/20 |
| Edge Bevel [Detailed Table Name: Silicon Optic; Specification: 100*120*10] | 0.5 ° × 45 ° |
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