Computer-Generated Holographic Phase Plate

Computer-Generated Holographic Phase Plate

Supplier
Zokgrating
Category
Diffractive Optics
Origin
China

Diffractive optical elements are fabricated using holographic ion-beam etching, including large-aperture diffraction gratings, silicon blazed/transmission-blazed gratings, and variable-spacing gratings. Computer-generated hologram phase plates (CGH) convert a laser interferometer's test wavefront into the required aspheric wavefront for aspheric testing. In theory, CGH can generate arbitrary freeform wavefronts. CGH testing is particularly suitable for high-precision aspheric surface measurement and batch inspection of established industrial aspheric designs. A phase-plate approach uses semiconductor processes to improve accuracy. Long-focal-length phase plates generally have periods above 10um. Current laser direct-writing equipment achieves 0.5um(PV) accuracy, with relative error below λ/20.

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Overview

Diffractive optical elements are fabricated using holographic ion-beam etching, including large-aperture diffraction gratings, silicon blazed/transmission-blazed gratings, and variable-spacing gratings. Computer-generated hologram phase plates (CGH) convert a laser interferometer's test wavefront into the required aspheric wavefront for aspheric testing. In theory, CGH can generate arbitrary freeform wavefronts. CGH testing is particularly suitable for high-precision aspheric surface measurement and batch inspection of established industrial aspheric designs. A phase-plate approach uses semiconductor processes to improve accuracy. Long-focal-length phase plates generally have periods above 10um. Current laser direct-writing equipment achieves 0.5um(PV) accuracy, with relative error below λ/20.

Specifications

ParameterValue
Size410mmX410mm
Line Width Errorless than 0.5μm
Etch-depth errorless than 5nm
Duty Cycle Errorless than 5%
Order 0 Diffracted Wavefront [λ=632.8nm]PV less than 1/4λ(λ=632.8nm)

Applications

High-precision aspheric surface figure inspection; batch inspection of established industrial aspheric designs

Datasheet

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Supplier Information

Zo
Zokgrating
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Anhui Zhongke Grating Technology Co., Ltd. was established in October 2020. It is a domestic manufacturer capable of providing meter-scale aperture diffraction gratings. It is a national high-tech enterprise and provincial specialized and new enterprise dedicated to the R&D, production, sales and technical services of optical components centered on gratings, AR diffractive waveguide display modules, ion beam etching equipment and other related products. The founding team has more than 40 years of technical accumulation in diffraction grating development, independently mastering core technologies such as 'grating design, holographic exposure, etching, and comprehensive cleaning', achieving independent control of a series of high-precision gratings and core process equipment. The core products fill gaps in domestic market. The company is located in Changlinhe Science and Technology Town, Feidong County, with over 1500 square meters of clean rooms (Class 100-1000) and 3000 square meters of R&D space, and R&D personnel accounting for over 40%.

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Computer-Generated Holographic Phase Plate
Zokgrating · Diffractive Optics
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