Ultraviolet Series Optical Elements
Product types include ArF and DUV projection objectives, illumination-system lenses, mirrors, beamsplitters, narrowband filters, long-wavelength cutoff filters, short-wavelength cutoff filters, high-transmission filters at 214nm and 254nm, and excimer laser windows at 190, 193, 226, 248, 266, and 308nm. Center wavelength, transmission bandwidth, and other parameters can be customized to customer requirements. Products also include 260-275nm bandpass filters, 260-320nm bandpass filters, 193nm dielectric mirrors, antireflection coatings for 193nm lenses and windows, and 193nm beamsplitting components.
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