MWL200 Wafer Inspection Machine
Smagics' MWL200 wafer inspection machine efficiently and safely handles 6-inch(150mm) and 8-inch(200mm) wafers. Noncontact optical centering minimizes contact during handling to preserve cleanliness and integrity. Integrated 360-degree macroscopic inspection observes both wafer faces without blind spots to identify surface defects and dust. Recipe management stores up to 10 process-parameter sets for rapid product switching, improving throughput and convenience. The system meets SEMI S2/S8 international safety and ergonomics standards for reliable front-end and back-end wafer handling.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Operation Mode | Fully Automatic Loading/Unloading |
| Dimensions [approximately ;L/W/H] | approximately L:1560mm*W:820mm*H:1200mm |
| Wafer Size | "6 & 8" wafer |
| Wafer Thickness | 80-1700μm |
| Wafer Warpage | ≤0.5mm |
| Operating Environment | Temperature :17℃-27℃; Humidity :35%-75%;Class 1000 |
| Cleanliness | ISO Class 5 |
| Material | Steel Frame/Aluminum/PEEK |
| Rust Prevention | Baked-Enamel Finish/Electroplating |
| Input Power Supply | AC 220V/20A |
| Gas Supply Input [Positive Pressure] | 4-8kg/cm² |
| Gas Supply Input [Negative Pressure] | -60 to -100kPa |
| Operating Mode | Automatic-Mode Operation/Manual-Mode Operation |
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Datasheet
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