Practical Laser Plane Interferometer XQ15-GIII
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Specifications
| Parameter | Value |
|---|---|
| First Reference Plane (Surface A) - Diameter D1 | Φ146mm |
| First Reference Plane (Surface A) - Surface Figure Deviation PV | (PV) Less Than 0.03μm (λ/20) |
| Second Reference Plane (Surface B) - Diameter | Φ140mm |
| Second Reference Plane (Surface B) - Surface Figure Deviation | Less Than 0.03μm (λ/20) |
| Collimation System - Working Diameter | Φ146mm |
| Collimation System—Focal Length f | 400mm |
| Light Source Specifications | ZN260 Laser (He-Ne) |
| Maximum Applicable Size | Φ500 mm × 250 mm |
Applications
Key Features
Datasheet
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