Large-Aperture Horizontal Laser Plane Interferometer XQ60-GI
This instrument uses a horizontal interferometric testing arrangement to address the challenge of final inspection of large-aperture, high-precision flat surfaces. Its single-channel design significantly reduces manufacturing costs while maximizing performance.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Clear Aperture | 600mm |
| Main Structure | Fizeau interferometry |
| Light Source Type | Frequency-Stabilized He-Ne Laser (Tunable Laser Optional) |
| Camera Effective Pixels | Better Than 1280x1024; Higher Pixel Counts Optional (Polarization Dynamic Camera and Corresponding Optomechanical Configuration Optional) |
| Optical Center Height | 415mm |
| Reference Surface Specifications | Fused Silica PV: Better Than λ/10 |
| Measurement Method | Standard Interference Fringe Analysis Software Enables Digital Measurement. |
| Pv Repeatability PV | <0.01λ |
| RMS Repeatability | <0.002λ |
| Power Supply | AC100-240V 50/60Hz |
| Recommended Air-Floating Platform Dimensions | 6.0 m × 2.0 m |
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Datasheet
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