340mm Vertical Laser Plane Interferometer XQ34-GI
The equipment uses a mobile inspection setup with a large working chamber to address in-process inspection of large-aperture, high-precision flats. A concealed curtain-style enclosure enables rapid screening measurements of large working discs in high-volume workshops. A high-resolution camera and display system reduce operator workload and make inspection more intuitive and convenient. A simplified structure reduces manufacturing costs while maintaining measurement accuracy, providing a noncontact, rapid measurement solution for low- and medium-precision manufacturers.
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Overview
Specifications
| Parameter | Value |
|---|---|
| First Reference Plane (Surface A) - Diameter D2 | Φ340mm |
| First Reference Plane (Surface A) - Surface Figure Deviation PV | PV Better Than 0.045μm (λ/15) |
| Second Reference Plane (Surface B) - Diameter D2 | Φ340mm |
| Second Reference Plane (Surface B) - Surface Figure Deviation PV | PV Better Than 0.045μm (λ/15) |
| Collimation System - Working Diameter | Φ340mm |
| Collimation System—Focal Length f | 1120mm |
| Working Chamber Dimensions | 1100x1100x350mm; measurement range: 1000mmx1000mm (travel) |
| Light Source Specifications | ZN250 Laser (He-Ne) (632.8nm) |
| Instrument Overall Dimensions | 1400x1250x1560mm(H) |
| Instrument Mass | 500kg |
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Datasheet
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