RF Neutralizer RFN 504424B
In ion-source systems, the neutralizer emits electrons into the ion beam to neutralize its charge. Conventional hot filaments erode rapidly, especially with reactive gases. An RF neutralizer generates electrons without a filament and sits outside the ion-beam path, significantly reducing maintenance and allowing reactive gases. Flanges and matching networks are purchased separately, with standard flange forms/sizes to meet system needs. Refurbishment includes cleaning, consumable replacement and testing before return.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Beam current [Max] | 900mA Max |
| RF power [Max] | 100W Max |
| Weight | 0.91 Kilograms (2 Pounds) |
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