Large-Area Roller-to-Plate Nanoimprint Equipment
1. Imprint area: 1020mm*1520mm. 2. Imprint precision: minimum line width ≤30nm. 3. Imprint speed: ≥1m/min. 4. Roller pressure: dead weight + set rated pressure. 5. Fully automatic imprinting, exposure and demolding, with adjustable demolding angle. 6. UV source: 365nm LED, maximum rated power 500mw/cm^2; area-source size 1100mm*75mm. Exposure is completed by moving the source at constant speed. 7. The chamber includes an FFU and an antistatic device to maintain a good internal environment. 8. Graphical software interface with real-time production-data feedback.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Imprinted Line Width | 20nm |
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