XNY-EBG-F Series Electron Gun
The XNY-EBG-F series electron gun was developed by combining the advantages of leading domestic and overseas electron guns. After years of repeated testing and continuous user feedback, it has become an advanced 270-degree electron gun meeting high-end user requirements. Its wide frequency-response range, good focusing, good uniformity and large beam-spot movement range have led to growing customer adoption. Combined with our intelligent electron-gun scanner and intelligent handheld remote controller, the XNY-EBG- F series makes coating operation easy and is a required configuration for fully automatic control systems.
Overview
Specifications
| Parameter | Value |
|---|---|
| Electron-Gun Power | 6KW-15 KW |
| Magnetic deflection | Permanent Magnet |
| Electron-Beam Deflection Angle | 270 degrees |
| X Scanning Current [10Hz-250Hz] | ±A adjustable 10Hz-250Hz |
| Anode Voltage | 8KV-10KV |
| Y Scanning Current [10Hz-250Hz] | ±3A adjustable 10Hz-250Hz |
| Beam current [Indirectly Cooled Crucible] | 0-500mA |
| Beam current [Directly Cooled Crucible] | 0-1.5A |
| Operating Vacuum | Below 8X10-Pa |
| Cathode Heating Power Supply | AC 4V +4V 60A adjustable |
| Crucible Cooling Water-Inlet Temperature | ≤25°C |
| Crucible Cooling Water-Inlet Pressure | ≥0.2MPa |
| Crucible Cooling Water-Water Flow | ≥8L/min |
Datasheet
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