XNY-ALS Anode-Layer Ion Source
Design features: The company's anode-layer ion source has a modular design allowing limited matching with existing equipment. Main components are the outer surface cathode, inner surface cathode, magnet, magnetic circuit (ion-source housing), anode, gas-distribution system and drive supply. Beyond existing designs, users may select customized bar length, customized mounting, multigas supply, ion-beam focusing mode, and a neutralizer filament for defocused high-current operation.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Outline [Focused mode / defocused mode] | L*145*45（mm） |
| Maximum Discharge Voltage [Focused Mode] | ＜3000V |
| Maximum Discharge Voltage [Defocused Mode] | ＜500V |
| Maximum Discharge Current [Focused Mode] | ＞150mA |
| Maximum Discharge Current [Defocused Mode] | ＜5A |
| Ion Energy [Focused Mode] | ＞1000eV |
| Ion Energy [Defocused Mode] | ＜100eV |
| Operating pressure [Focused Mode] | 3*10-2-1.5*10-1Pa |
| Operating pressure [Defocused Mode] | 3.5*10-1-5*10-1Pa |
| Gas Flow rate [Focused mode / defocused mode] | 0-500Sccm |
| Cooling water pipe [Focused mode / defocused mode] | Φ8 or Φ12 |
| Cooling water Impedance [Focused mode / defocused mode] | 50KΩ/M |
| Control Method [Focused mode / defocused mode] | Local/Remote |
| Applicable Range [Focused mode / defocused mode] | ＜100°C Plasma Cleaning and Assisted Coating |
Key Features
Datasheet
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Supplier Information
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