CF Series Ultrahigh-Vacuum Gate Valve (Pneumatic)
This pneumatically actuated valve opens and closes pipelines in ultrahigh-vacuum systems. Smooth operation, reliability, excellent sealing and long service life make it a preferred valve for ultrahigh-vacuum equipment. Compressed air opens or closes the valve plate; if the air supply is lost, spring force automatically closes it. Suitable media include air and a small number of corrosive gases.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Applicable Range | 1×10⁻⁶pa～1.2×10⁵Pa |
| Differential Pressure across the Valve Plate When Open [When Open; Any Direction] | ≤1.2×10⁵a in Any Direction |
| Valve Body and Seat Leak Rate | <1.3×10⁻⁷Pa·L·s⁻¹ |
| Cycles before First Maintenance | 800，000 times |
| Valve-Body Bakeout Temperature [When Open] | ≤200℃ When Open |
| Valve-Body Bakeout Temperature [When Closed] | ≤150℃ When Closed |
| Mounting position | Any |
| Power supply | AC 220V 50Hz, 6W, or DC 24V, 3W; special specifications customizable |
| Compressed Air | 0.4～0.7MPa |
| Valve Opening/Closing Time | ≤1s |
| Valve Position Indicator [Pneumatic Drive] | Pneumatic drive with open/closed-position indication switch (magnetic switch) |
Key Features
Datasheet
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