Spectral Monochromator
An integrated instrument for real-time extreme-ultraviolet spectral observation and automatic in-situ monochromatic selection. It covers 9.5 nm - 80 nm, expandable to 1 - 200 nm, with high spectral resolving power (λ / Δλ >100) and flexible monochromatic wavelength output. Confocal spectroscopy provides diffraction efficiency of 30 %-78 % and total monochromatization efficiency exceeding 40 % at maximum, as in the customized HHG 13.5 nm version. Automated operation combines spectral observation with monochromatic selection. Applications include high-harmonic generation, plasma diagnostics and astronomical EUV analysis, with high signal-to-noise ratio and energy-transfer efficiency.
Specification Snapshot
Difraction Efciency
30 % - 78 %
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Overview
An integrated instrument for real-time extreme-ultraviolet spectral observation and automatic in-situ monochromatic selection. It covers 9.5 nm - 80 nm, expandable to 1 - 200 nm, with high spectral resolving power (λ / Δλ >100) and flexible monochromatic wavelength output. Confocal spectroscopy provides diffraction efficiency of 30 %-78 % and total monochromatization efficiency exceeding 40 % at maximum, as in the customized HHG 13.5 nm version. Automated operation combines spectral observation with monochromatic selection. Applications include high-harmonic generation, plasma diagnostics and astronomical EUV analysis, with high signal-to-noise ratio and energy-transfer efficiency.
Specifications
| Parameter | Value |
|---|---|
| Wavelength Window [Expandable to 1-200 nm] | 9.5 nm - 80 nm (Expandable to 1-200 nm) |
| SpectraType | Confocal Spectroscopy |
| Difraction Efciency | 30 % - 78 % |
| Spectral Bandwidth Resolution λ/Δλ | (λ/Δλ）＞100 |
| Monochromatic Wavelength [Flexible Options, In-Situ Output] | 9.5 nm - 80 nm, flexibly selectable, in-situ output |
| Monochromatic Bandwidth [Customizable] | 0.1 nm - 1 nm customizable |
| Monochromatic Total Efciency | 14.7% - 42.2% |
Applications
High-harmonic, plasma-diagnostic, and astronomical EUV analysis; spectroscopy of HHG, laser plasma (LPP), discharge plasma (DPP), inverse Compton scattering, EUV synchrotron radiation, and EUV free-electron lasers.
Key Features
Highly automated and simple; simultaneous spectroscopy/monochromatic selection with easy in-situ wavelength switching; high diffraction efficiency, peak intensity, signal/noise, and overall throughput minimize losses; confocal wide-band, high-resolution spectroscopy; custom optics maximize monochromatization efficiency at target wavelength (HHG13.5 nm version above 40%); custom/switchable optics control focused, parallel, or divergent output and preset focus.
Datasheet
Product Datasheet
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Supplier Information
Hefei Haoyu Xinguang Technology Co., Ltd. was founded in 2023, focusing on advanced laser applications and core semiconductor inspection & measurement technologies. It specializes in core components, instruments, and system development for the extreme ultraviolet (EUV) / vacuum ultraviolet (VUV) band. Co-founded by renowned EUV laser experts and industry veterans, the company is committed to customer-driven innovation and efficient service, aiming to become a world-leading advanced laser applications enterprise.
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