ABP XY planar air-bearing stage (ABP-300)
Specification Snapshot
Resolution
20 nm
Positioning Accuracy [Y (Lower Axis)]
±0.4 μm
Positioning Accuracy [X (Upper Axis)]
±0.2 μm
Positioning Repeatability [Y (Lower Axis)]
±0.2 μm
Positioning Repeatability [X (Upper Axis)]
±0.1 μm
Straightness
1 μm
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Specifications
| Parameter | Value |
|---|---|
| Effective Travel | 300 mm |
| Load | 50 kg |
| Speed | 1200 mm/s |
| Acceleration | 2 G |
| Resolution | 20 nm |
| Positioning Accuracy [Y (Lower Axis)] | ±0.4 μm |
| Positioning Accuracy [X (Upper Axis)] | ±0.2 μm |
| Positioning Repeatability [Y (Lower Axis)] | ±0.2 μm |
| Positioning Repeatability [X (Upper Axis)] | ±0.1 μm |
| Straightness | 1 μm |
| Flatness | 1 μm |
Key Features
Air-bearing stage support, completely frictionless, wear-free, oil-free; planar air-bearing structure, low center of gravity, high rigidity; sub-micron positioning and repeat positioning accuracy; maximum speed 1200mm/s, maximum acceleration up to 2G; straightness and flatness up to 1μm; fully air-bearing, magnetic or vacuum preload
Datasheet
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Supplier Information
Jiangsu Jitri Uptech Co., Ltd. is located in Kunshan City, Jiangsu Province, and was registered in April 2019. It is an independent legal entity with state-owned equity participation.
Jitri Uptech has gathered a group of industry talents in technical fields such as machinery, electrical, control, materials, and manufacturing, as well as in enterprise management, marketing, and investment and financing, forming a multi-dimensional talent system for forward-looking research, technological innovation, industrial application, and enterprise operation. It has passed ISO 9001 quality management system certification, ISO 14001 environmental management system, and ISO 45001 occupational health and safety management system.
The company has a Class 10,000 cleanroom, testing room, and an ultra-precision machining workshop with vibration isolation foundation, and possesses a batch of high-precision processing and testing equipment, which can provide high-precision turning, grinding, milling, EDM, and high-precision parts testing services.
Relying on its own core technology, engineering capabilities, and advanced processing and testing equipment, facing the needs of semiconductors, new displays, perovskite photovoltaics, and other fields, it focuses on the R&D, design, manufacturing, and service of high-precision air-floating linear motion axes, air-floating rotary tables, and multi-axis air-floating motion platforms.
Jitri Uptech's purpose: customer demand-oriented, solving problems for customers as the goal, and creating value for customers as the purpose.
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