193nm Low-order Waveplate (WPL-410-193)

193nm Low-order Waveplate (WPL-410-193)

Supplier
Mt-optics
Part Number
WPL-410-193
Category
Waveplates
Origin
China

The 193nm low-order waveplate is a deep ultraviolet polarization device that can precisely control the polarization state of incident light. It is suitable for deep ultraviolet optical systems such as lithography and laser research, and is made of special materials resistant to 193nm radiation, ensuring stability and precision.

Specification Snapshot
Material
Quartz Crystal
Parallelism
<1 ″
Diameter [Quarter-wave Plate]
10.0 mm
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Overview

The 193nm low-order waveplate is a deep ultraviolet polarization device that can precisely control the polarization state of incident light. It is suitable for deep ultraviolet optical systems such as lithography and laser research, and is made of special materials resistant to 193nm radiation, ensuring stability and precision.

Specifications

ParameterValue
MaterialQuartz Crystal
Diameter Tolerance+0.0 mm, -0.1 mm
Wavefront Distortion [@ 632.8nm]λ/8 @ 632.8 nm
Retardation Accuracyλ/50
Parallelism<1 ″
Surface Quality20/10
Clear Aperture>90 %
CoatingUncoated or custom coating as required
Standard Wavelength193.368 nm
Diameter [Quarter-wave Plate]10.0 mm

Key Features

Thickness: 0.05-0.5mm; high damage threshold; high retardation uniformity; the 193nm low-order waveplate achieves high-amplitude phase retardation by optimizing birefringent materials specifically for deep ultraviolet wavelengths and combining ion beam finishing technology. Its core advantages include high retardation accuracy with a phase error <±1% at 193nm — the application of ion beam finishing technology greatly reduces microscopic deviations in the material's optical thickness, thereby providing more precise polarization control for deep ultraviolet laser systems such as excimer lasers. Its compact structure requires no complex cascaded design, making it highly suitable for integrated deep ultraviolet optical modules in lithography systems; the higher laser damage threshold (>5 J/cm² @ 193nm) ensures its reliability in high-power deep ultraviolet applications, while the ultra-smooth surface formed by ion beam finishing further reduces the risk of local energy accumulation under high-energy laser irradiation. In deep ultraviolet spectral polarization measurement systems, the stable phase retardation guaranteed by ion beam finishing keeps the polarization degree measurement error within 2%, facilitating high-precision polarization analysis for scenarios such as photoresist characterization and atmospheric ozone layer spectral analysis.

Datasheet

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Supplier Information

Mt
Mt-optics
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MT-Optics, Inc., founded in 2011, is a professional manufacturer and exporter of photonic crystals and optical components. The company has about 150 employees and a factory area of 5,000 square meters. Its main products are exported to Europe and the United States. We have an experienced team of technical experts and engineers with more than 20 years of experience in the optics field, dedicated to producing reliable, high-quality products at highly competitive prices. We always adhere to the customer-first principle and strive to help customers develop successful applications. MT-Optics, Inc. continuously pursues technological innovation and possesses unique technology and production capabilities in manufacturing super-polished, ultra-thin, high-precision and high-quality optical components. We have advanced processing equipment, including CNC plano milling machines, high-speed polishers, precision polishers, CNC grinding and polishing machines, IBF300 ion beam finishing machines, Optorun coating machines, ultrasonic cleaners, etc. In addition, we have advanced testing instruments, including Trioptics lens measurement systems, Hinds Instruments Exicor 150AT, Zygo interferometers, Cary 7000 spectrophotometers, Trioptics Prism Master 0.5-inch prism measurement systems, etc. These advanced equipments ensure that we can provide strong production capacity and high-quality products for OEM and custom products. With close cooperation with global customers, MT-Optics, Inc. has won a good reputation and broad development opportunities. Fully understanding customer needs and truly solving their problems is the service philosophy of MT-Optics, Inc. MT-Optics, Inc. provides excellent service and technical support, offering customers one-stop solutions. We are committed to providing customers with high-quality products, highly competitive prices, on-time delivery and excellent service.

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193nm Low-order Waveplate (WPL-410-193)
Mt-optics · Waveplates
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