193nm Low-order Waveplate (WPL-210-193)
The 193nm low-order waveplate is a deep ultraviolet polarization device that can precisely control the polarization state of incident light. It is suitable for deep ultraviolet optical systems such as lithography and laser research, and is made of special materials resistant to 193nm radiation, ensuring stability and precision.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Material | Quartz Crystal |
| Diameter Tolerance | +0.0 mm, -0.1 mm |
| Wavefront Distortion [@ 632.8nm] | λ/8 @ 632.8 nm |
| Retardation Accuracy | λ/50 |
| Parallelism | <1 ″ |
| Surface Quality | 20/10 |
| Clear Aperture | >90 % |
| Coating | Uncoated or custom coating as required |
| Standard Wavelength | 193.368 nm |
| Diameter [Half-wave Plate] | 10.0 mm |
Key Features
Datasheet
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Supplier Information
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