Air-bearing dual-axis
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Specifications
| Parameter | Value |
|---|---|
| Effective Travel [Upper Axis] | 100mm、200mm、300mm |
| Effective Travel [Lower Axis] | 100mm、200mm、300mm、400mm、500mm |
| Maximum Speed at Rated Payload [Scan/Step Axis] | 2000mm/s |
| Peak Acceleration at Rated Payload [Scan/Step Axis] | 2G |
| Rated Payload | 50kg |
| Velocity Fluctuation (Sampled at 400 mm/s) | 0.1% |
| Mean Time Between Failures | 20000h |
| Positioning Accuracy [Test Height 25 mm above the Table Surface] | ±0.5μm |
| Positioning Repeatability [Test Height 25 mm above the Table Surface] | ±0.35μm |
| XY Position Stability [Test Height 25 mm above the Table Surface] | ±20nm |
| Pitch [Test Height 25 mm above the Table Surface] | 2 arc sec |
| Roll [Test Height 25 mm above the Table Surface] | 2 arc sec |
| Yaw [Test Height 25 mm above the Table Surface] | 2 arc sec |
| XY Straightness [Test Height 25 mm above the Table Surface] | 2μm |
| XY Flatness [Test Height 25 mm above the Table Surface] | 3μm |
| XY Orthogonality [Test Height 25 mm above the Table Surface] | 2 arc sec |
| Supply Voltage | 220VAC |
| Limit-switch Voltage | 5-24VDC |
| Air Filtration Rating | 0.5μm or Better |
Applications
Key Features
Datasheet
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Supplier Information
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