ABZ air-bearing lift Z-axis
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Specifications
| Parameter | Value |
|---|---|
| Travel | 5/10/20/30 mm |
| Maximum Load | 10-50 kg |
| Speed | 10 mm/s |
| Resolution | 10 nm |
| Positioning Accuracy [5 mm] | ±0.5 μm |
| Positioning Accuracy [10 mm] | ±0.5 μm |
| Positioning Accuracy [20 mm] | ±0.75 μm |
| Positioning Accuracy [30 mm] | ±1 μm |
| Repeatability [5 mm] | ±0.25 μm |
| Repeatability [10 mm] | ±0.25 μm |
| Repeatability [20 mm] | ±0.3 μm |
| Repeatability [30 mm] | ±0.5 μm |
| Straightness [5 mm] | 1 μm |
| Straightness [10 mm] | 1 μm |
| Straightness [20 mm] | 2 μm |
| Straightness [30 mm] | 3 μm |
| pitch [5 mm] | 3 arc sec |
| pitch [10 mm] | 3 arc sec |
| pitch [20 mm] | 5 arc sec |
| pitch [30 mm] | 5 arc sec |
| yaw [5 mm] | 3 arc sec |
| yaw [10 mm] | 3 arc sec |
| yaw [20 mm] | 5 arc sec |
| yaw [30 mm] | 5 arc sec |
| Following Error | 0.3 μm |
| Sampling frequency | 4K Hz |
| Air Supply Pressure | 0.5-0.6MPa |
| Failure-free Operating Time | 20000h |
| Supply Voltage | 220VAC |
| Limit-switch Voltage | 5-24VDC |
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Key Features
Datasheet
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Supplier Information
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