ABL Air Bearing Linear Single-Axis
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Specifications
| Parameter | Value |
|---|---|
| Travel | 100/200/300/400/500/600/800/1000 mm |
| Load | 30-100 kg |
| Maximum Speed | 100-2000 mm/s |
| Acceleration | 1-2 G |
| Resolution | 1-100 nm |
| Positioning Accuracy [100 mm] | ±0.2 μm |
| Positioning Accuracy [200 mm] | ±0.2 μm |
| Positioning Accuracy [300 mm] | ±0.2 μm |
| Positioning Accuracy [400 mm] | ±0.3 μm |
| Positioning Accuracy [500 mm] | ±0.3 μm |
| Positioning Accuracy [600 mm] | ±0.3 μm |
| Positioning Accuracy [800 mm] | ±0.4 μm |
| Positioning Accuracy [1000 mm] | ±0.4 μm |
| Repeatability [100 mm] | ±0.1 μm |
| Repeatability [200 mm] | ±0.1 μm |
| Repeatability [300 mm] | ±0.1 μm |
| Repeatability [400 mm] | ±0.15 μm |
| Repeatability [500 mm] | ±0.15 μm |
| Repeatability [600 mm] | ±0.15 μm |
| Repeatability [800 mm] | ±0.2 μm |
| Repeatability [1000 mm] | ±0.2 μm |
| Straightness [100 mm] | 1 μm |
| Straightness [200 mm] | 1 μm |
| Straightness [300 mm] | 1 μm |
| Straightness [400 mm] | 1.5 μm |
| Straightness [500 mm] | 1.5 μm |
| Straightness [600 mm] | 2 μm |
| Straightness [800 mm] | 3 μm |
| Straightness [1000 mm] | 3 μm |
| Flatness [100 mm] | 1 μm |
| Flatness [200 mm] | 1 μm |
| Flatness [300 mm] | 1 μm |
| Flatness [400 mm] | 1.5 μm |
| Flatness [500 mm] | 1.5 μm |
| Flatness [600 mm] | 2 μm |
| Flatness [800 mm] | 3 μm |
| Flatness [1000 mm] | 3 μm |
| pitch [100 mm] | 2 arc sec |
| pitch [200 mm] | 2 arc sec |
| pitch [300 mm] | 2 arc sec |
| pitch [400 mm] | 2 arc sec |
| pitch [500 mm] | 3 arc sec |
| pitch [600 mm] | 3 arc sec |
| pitch [800 mm] | 3 arc sec |
| pitch [1000 mm] | 3 arc sec |
| yaw [100 mm] | 2 arc sec |
| yaw [200 mm] | 2 arc sec |
| yaw [300 mm] | 2 arc sec |
| yaw [400 mm] | 2 arc sec |
| yaw [500 mm] | 3 arc sec |
| yaw [600 mm] | 3 arc sec |
| yaw [800 mm] | 3 arc sec |
| yaw [1000 mm] | 3 arc sec |
| Positioning Jitter | 50 nm |
| Minimum step | 30 nm |
| Dimensional Thrust | 100-1000 N |
| Velocity Uniformity [500mm/s] | 0.1%@500mm/s |
| Air Supply Pressure | 0.5-0.6MPa |
| Failure-free Operating Time | 20000h |
| Supply Voltage | 220VAC |
| Limit-switch Voltage | 5-24VDC |
Applications
Key Features
Datasheet
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