TMIR Microscopic Imaging Temperature Measurement System (TMIR-9500)
The Yashi Hengyuan TMIR series is a domestically-produced infrared microscopic imaging temperature measurement system based on microscopic infrared thermal imaging technology, aimed at high-precision temperature measurement of semiconductor device micro-regions, and adopts a non-contact, non-destructive measurement mode.
Specification Snapshot
Thermal Sensitivity
25 mK
Spectral Range
3~5 μm
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Overview
The Yashi Hengyuan TMIR series is a domestically-produced infrared microscopic imaging temperature measurement system based on microscopic infrared thermal imaging technology, aimed at high-precision temperature measurement of semiconductor device micro-regions, and adopts a non-contact, non-destructive measurement mode.
Specifications
| Parameter | Value |
|---|---|
| Detector specifications | 1280×1024 pixels |
| Thermal Sensitivity | 25 mK |
| Spectral Range | 3~5 μm |
| Temperature Measurement Range | 20~350 ℃ |
| Optional Lenses | Standard: 25 mm, Microscopic: 1.0X, 3.0x, 8.0x |
| Emissivity Correction | Steady-state, transient, pulsed temperature measurement |
| Constant Temperature Stage | Range: 20~150 ℃; Accuracy: ≤0.5 ℃; Heat dissipation power: ≥150w; Stage size: 100 mm×100 mm |
| Probe Station [Optional] | Integrated, capable of measuring wafers or decapsulated devices (standard DC mode probe), optional RF probe |
| Z-Axis | Motorized focus, travel 150 mm, positioning accuracy ±0.5 μm |
| X,Y-Axis | Motorized specimen stage, travel 50 mm, positioning accuracy ±2 μm |
| Computer | CORE i9 processor, 32 GB memory, 1 TB SSD, 27-inch 4 K monitor |
| Chassis | Split-type vibration-isolation optical table protective cover or integrated vibration-isolation, light-shielding cabinet |
| Other Thermal Measurement Equipment | Can integrate: various electrical-method temperature measurement devices, reflective thermal imaging temperature measurement systems |
Applications
Semiconductor R&D, quality control, failure analysis and scientific research; thermal characterization testing of various devices, mass-production temperature measurement and failure localization
Key Features
Micron-level spatial resolution, capable of precisely capturing full-field temperature distribution and multi-dimensional temperature data; the system integrates a mid-wave infrared imaging unit, an infrared microscope lens and dedicated analysis software; the highly stable motorized stage suppresses vibration, enables rapid and precise positioning of micro-regions, and supports software-direct focus control; the modular architecture is suitable for laboratory R&D and production-line control scenarios.
Datasheet
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Supplier Information
Beijing Yashi Hengyuan Technology Development Co., Ltd. was established in 2003, focusing on the R&D, production, agency and related technical services of infrared measurement systems, committed to providing customers with reliable high-performance infrared measurement products and professional application support. Products include: thermal reflection microscopic imaging temperature measurement systems, infrared microscopic imaging temperature measurement systems, semiconductor defect detection systems, multi-spectral high-temperature high-speed thermometers, infrared thermal imaging systems, infrared thermal imagers, etc. We deeply understand that providing customers with reliable product quality, excellent product performance and professional and meticulous service is the key factor for the company to win long-term customer trust and succeed in fierce competition.
Independently developed and launched the ImageTR series thermal reflection imaging temperature measurement system. This is a masterpiece of the expert team after years of deep cultivation in the field of micro-nano heat conduction and device thermal behavior analysis, condensing profound technical accumulation and R&D strength. As the first commercialized domestic thermal reflection imaging temperature measurement equipment, it not only fills the domestic gap, but also opens up a new detection path for the semiconductor field with its unique technical path and high cost performance. The R&D team has both solid technical reserves and rich experience, deeply understands the core needs and actual pain points of users, so that the product is precisely tailored to the demands from the beginning of design. Its successful commercialization provides customers with a domestic preferred solution for high-performance thermal reflection imaging temperature measurement systems.
The ImageTR series thermal reflection imaging temperature measurement system breaks through the bottleneck of traditional temperature measurement with innovative technology. It does not rely on the object's own infrared radiation, but captures the change of material surface reflectivity with temperature under visible light (ultraviolet) irradiation to infer accurate temperature distribution. It does not require spraying or special treatment on low-emissivity samples such as metal coatings and semiconductor wafers, avoiding sample damage and detection errors from the source. Core performance benchmarks against similar international products and has more localized advantages: 300nm ultra-high spatial resolution can accurately capture tiny heat generation areas below 0.5μm, 50ns ultra-short time response can freeze microsecond-level pulse transient heat distribution, combined with 2048×2048 pixel high-definition temperature distribution map and pixel-level calibration algorithm, achieving precise positioning of tiny hot spots, providing key data support for device thermal management optimization, reliability evaluation and failure analysis. At the same time, relying on the independent and controllable domestic mature supply chain, the delivery cycle is shortened by more than 60% compared with imported equipment. The service team provides 24-hour rapid response, efficiently solving troubleshooting and maintenance needs, significantly reducing usage costs. Its technical capabilities deeply empower the thermal design, reliability evaluation and failure analysis of advanced semiconductor devices such as GaN HEMT and FinFET, helping to shorten R&D cycles and enhance core competitiveness.
Yashi Hengyuan is the general agent in China (including Hong Kong and Macao) of InfraTec GmbH Infrarotsensorik und Messtechnik, a world-renowned infrared thermal imager manufacturer in Germany, responsible for technical consulting, product demonstration, sales promotion, customer training and technical support for its infrared thermal imagers, infrared imaging systems and application solutions. In the field of infrared imaging, InfraTec is synonymous with professionalism and high standards. Since its establishment in 1991, it has always taken the R&D and manufacturing of infrared equipment and customized solutions with better performance and higher technical level as its core goal. The carefully crafted multiple series of products and solutions have won high recognition and trust from global customers. Its product line covers comprehensively and accurately adapts to multi-scenario needs,
including:
ImageIR series mid-wave,
long-wave cooled infrared thermal imagers,
VarioCAM HD series infrared thermal imagers,
high-resolution microscopic infrared imaging temperature measurement systems,
E-LIT semiconductor defect detection and positioning systems,
Active Thermography System active excitation infrared non-destructive testing systems,
PV-LIT solar cell and module defect detection systems,
Thermo Check Weld automated welding quality inspection systems,
Press Check hot stamping process infrared thermal imaging temperature monitoring systems,
INDUSCAN steel process monitoring systems,
FIRESCAN fire early prevention and detection systems,
IRBIS Rotate high-speed rotating target test bench (suitable for rotating targets such as brake discs and tires),
IROD safety monitoring infrared detection systems, airborne thermal imaging systems,
and infrared imaging consulting and testing services.
Our service team is experienced and passionate, always adhering to the "customer first" concept and providing professional support to customers. Before sales, we provide accurate technical consulting and targeted product selection services, and are equipped with a professional testing laboratory to provide free equipment demonstrations, feasibility verification and customized sample testing for customers to ensure that the selection meets actual needs; after sales, we provide timely equipment usage training, regular maintenance, rapid troubleshooting and other services to fully ensure the stable operation of customer equipment. With a complete product system and professional services, our customers cover many scientific research and industrial production fields such as microelectronics, energy production, petrochemicals, aerospace, ships, automobiles, railways, building inspection, metallurgy, industrial process optimization and quality control, composite material non-destructive testing, flame and gas measurement and analysis, land remote sensing, geotechnical research, environmental ecology research, cultural relic protection research, animal and plant research, medical research, etc.
In the future, Yashi Hengyuan will adhere to customer needs as the starting point, continue independent innovation, optimize the performance and localization level of the domestic ImageTR series thermal reflection imaging temperature measurement system; at the same time, actively introduce more technologically advanced foreign products, provide more high-level products and more detailed professional services for various industries, create more value for customers and achieve win-win results.
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