UVLED Parallel Light Source (UVLED-365-6-400-WC/AC)
Using LED single-band or mixed-band as the light source, after shaping with an array of optical lenses, it outputs uniform parallel light to form a surface light source (rectangular or specially shaped light spot), realizing ultraviolet light with a wavelength of 365nm (313nm or 405nm, 435nm mixed light). The light beam vertically irradiates the mask of the semiconductor lithography machine for chip light exposure, with high light energy utilization and uniform light intensity distribution.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Light source | LED |
| Operating Wavelength [customizable 405nm, 435nm or mixed bands] | Dominant Wavelength 365 nm (customizable 405 nm, 435 nm or mixed bands) |
| Illumination Size [customizable 4-inch--12-inch exposure area] | >160 mm x160mm (customizable 4-inch--12-inch exposure area) |
| Illumination Non-uniformity | <2 % |
| Illumination Intensity [365nm; air cooling/water cooling; 365nm (air cooling)/>100mw/cm2@365nm (water cooling)] | >30mw/cm2@365 nm (air cooling)/>100mw/cm2@365 nm (water cooling) |
| Collimation Angle [Customizable] | <2 ° (customizable) |
| Tilt Angle | <0.3 ° |
| Working Distance [can be customized according to customer requirements] | 200-400mm (can be customized according to customer requirements) |
| Dimensions | Length×Width×Height ≤550 mm *350 mm *600 mm |
| Energy Adjustment [local or remote] | Adjust and control LED power (local or remote) |
| Energy Detection | Real-time Monitoring of Optical Path Energy |
Applications
Datasheet
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Supplier Information
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