193nm air-gap zero-order waveplate
The 193nm air-gap waveplate uses a dual-quartz air-gap structure, greatly reducing material absorption loss, and has excellent transmittance in deep ultraviolet bands such as ArF excimer lasers. Its air-gap design avoids the thermal stress generated by bonding and can withstand long-term high-power laser operation. Combined with ion beam polishing technology, the waveplate achieves nanometer-level surface flatness, significantly reducing scattering loss and optimizing wavefront quality, and is suitable for high-precision polarization control in lithography processes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Material | Quartz |
| Diameter Tolerance | +0.0, -0.1 mm |
| Wavefront Distortion | λ/8 @ 632.8nm |
| Delay Tolerance | λ/50 |
| Parallelism | <1 arcsecond |
| Surface Finish | 20/10 |
| Optical Aperture | >80% |
| Coating | S1&S2：R<0.2% @ Wavelength |
| Standard Wavelength | 193 nm |
Datasheet
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