193nm Glan laser polarizer
The technical advantages of 193nm Glan laser polarizers include high polarization purity, maintaining stable performance even at wide-angle incidence. They have excellent thermal stability, with minimal optical fluctuation over a wide temperature range. With strong laser damage resistance, they are suitable for high-power deep ultraviolet applications. They are compatible with deep ultraviolet optical systems and easy to install, perfectly meeting the needs of high-precision applications such as lithography and laser inspection.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Material | EUV Crystal Body |
| Wavelength Range | 193.368 nanometers |
| Extinction Ratio | <1x10⁻⁴ |
| Parallelism | <1 arcmin |
| Surface Finish | 20/10 |
| Beam Deviation | < 3 arcmin |
| Wavefront distortion | λ/4@632.8nm |
| Damage Threshold | >500 MW/cm² |
Datasheet
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Supplier Information
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