Thin Film Thickness Measurement Instrument AF Series

Thin Film Thickness Measurement Instrument AF Series

Supplier
Atometrics
Category
Optical Metrology
Origin
China

Precise deviation correction for ultra-high resolution; millisecond-level sampling frequency, 2~3 times faster than traditional film thickness meters, more suitable for online use! Supports Mapping mode with automatic fast measurement, single-point time <0.5 s, compatible with 2-12 inch wafers.

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Overview

Precise deviation correction for ultra-high resolution; millisecond-level sampling frequency, 2~3 times faster than traditional film thickness meters, more suitable for online use! Supports Mapping mode with automatic fast measurement, single-point time <0.5 s, compatible with 2-12 inch wafers.

Specifications

ParameterValue
Single-Point Measurement Time<0.5s
Applicable Wafer SizeCompatible with 2-12 inch wafers

Applications

Transparent films, semi-transparent films, multilayer film thickness; application examples: film thickness SiO2-film thickness photoresist-film thickness microchannel-film thickness finished film-film thickness PI film-film thickness glass bonding-film thickness ITO-film thickness perovskite-film thickness.

Datasheet

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Supplier Information

At
Atometrics
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Banshi Intelligent Technology (Shenzhen) Co., Ltd. (brand: Atometrics) was established in 2017, headquartered in Shenzhen. It is a national-level specialized and sophisticated 'Little Giant' enterprise and a high-tech enterprise, focusing on high-precision measuring instruments and semiconductor metrology and inspection equipment. The company has launched various high-precision measurement products such as white light interferometers, flash measuring instruments, super depth-of-field microscopes, laser sensors, spectral confocal sensors, wafer 3D metrology equipment, etc., which are widely used in semiconductors, aerospace, 3C electronics, 5G communication, new energy, biomedical and other fields. Major customers include Huawei HiSilicon, CATL, Chinese Academy of Sciences, and other well-known enterprises, committed to exploring the future of humanity with precision measurement.

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Thin Film Thickness Measurement Instrument AF Series
Atometrics · Optical Metrology
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